Planar Optical Waveguides in KNbO3 Formed by MeV B and He Ion Implantation
LI Yan1, XIA Zong-huang1, SHEN Ding-yu1, WANG Xue-mei1, ZHAO Qiang1, MA Xiao-yan2, SHEN De-zhong2, WANG Kui-ru3
1Department of Technical Physics, Institute of Heavy Ion Physics, Peking University, Beijing 100871
2Research Institute of Synthetic Crystals, Beijing 100018
3Department of Applied Science and Technology, Beijing University of Posts and Communications, Beijing 100876
Planar Optical Waveguides in KNbO3 Formed by MeV B and He Ion Implantation
LI Yan1;XIA Zong-huang1;SHEN Ding-yu1;WANG Xue-mei1;ZHAO Qiang1;MA Xiao-yan2;SHEN De-zhong2;WANG Kui-ru3
1Department of Technical Physics, Institute of Heavy Ion Physics, Peking University, Beijing 100871
2Research Institute of Synthetic Crystals, Beijing 100018
3Department of Applied Science and Technology, Beijing University of Posts and Communications, Beijing 100876
Abstract： Planar optical waveguides in single crystals of KNbO3 were fabricated by MeV B and He ion implantation. The depth profiles of radiation damage in these waveguides were compared and analyzed by high resolution transmission electron microscope. Non leaky waveguiding modes (TE0 and TM0), which are due to implantation induced increase of nb and nc, were observed in 6.0 MeV B ion implantated waveguides with a dose of 1 x 1015cm-2.
(Defects and impurities: doping, implantation, distribution, concentration, etc.)
引用本文:
LI Yan;XIA Zong-huang;SHEN Ding-yu;WANG Xue-mei;ZHAO Qiang;MA Xiao-yan;SHEN De-zhong;WANG Kui-ru. Planar Optical Waveguides in KNbO3 Formed by MeV B and He Ion Implantation[J]. 中国物理快报, 1999, 16(10): 731-733.
LI Yan, XIA Zong-huang, SHEN Ding-yu, WANG Xue-mei, ZHAO Qiang, MA Xiao-yan, SHEN De-zhong, WANG Kui-ru. Planar Optical Waveguides in KNbO3 Formed by MeV B and He Ion Implantation. Chin. Phys. Lett., 1999, 16(10): 731-733.
1999, Vol. 16 
