A High-Q Quartz Crystal Microbalance with Mass Sensitivity up to 10$^{17}$Hz/kg
Qiao Chen, Xian-He Huang** , Wei Pan, Yao Yao
School of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 611731
Abstract ：A high-$Q$ quartz crystal microbalance (QCM) sensor with a fundamental resonance frequency of 210 MHz is developed based on inverted mesa technology. The mass sensitivity reaches $5.332\times 10^{17}$ Hz/kg at the center of the electrode, which is 5–7 orders of magnitude higher than the commonly used 5 MHz or 10 MHz QCMs (their mass sensitivity is $10^{10}$–$10^{12}$ Hz/kg). This mass sensitivity is confirmed by an experiment of plating 1-ng rigid aluminium films on the surface of the QCM sensor. By comparing the changes in QCM equivalent parameters before and after coating the aluminum films, it is found that the QCM sensor maintains the high-$Q$ characteristics of the quartz crystal while the mass sensitivity is significantly improved. Therefore, this QCM sensor may be used as a promising analytical tool for applications requiring high sensitivity detection.
收稿日期: 2019-08-15
出版日期: 2019-11-25
:
07.07.Mp
(Transducers)
07.75.+h
(Mass spectrometers)
43.25.Zx
(Measurement methods and instrumentation for nonlinear acoustics)
43.35.Ns
(Acoustical properties of thin films)
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2019, Vol. 36 
