Stress, Roughness and Reflectivity Properties of Sputter-Deposited B$_{4}$C Coatings for X-Ray Mirrors
Jia-Li Wu1,2 , Run-Ze Qi2,3 , Qiu-Shi Huang2,3 , Yu-Fei Feng2,3 , Zhan-Shan Wang2,3** , Zi-Hua Xin1**
1 Department of Physics, Shanghai University, Shanghai 2004442 MOE Key Laboratory of Advanced Micro-Structured Materials, Shanghai 2000923 Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092
Abstract ：Boron carbide (B$_{4}$C) coatings have high reflectivity and are widely used as mirrors for free-electron lasers in the x-ray range. However, B$_{4}$C coatings fabricated by direct-current magnetron sputtering show a strong compressive stress of about $-3$ GPa. By changing the argon gas pressure and nitrogen-argon gas mixing ratio, we are able to reduce the intrinsic stress to less than $-1$ GPa for a 50-nm-thick B$_{4}$C coating. It is found that the stress in a coating deposited at 10 mTorr is $-0.69$ GPa, the rms roughness of the coating surface is 0.53 nm, and the coating reflectivity is 88%, which is lower than those of coatings produced at lower working pressures. When the working gas contains 8% nitrogen and 92% argon, the B$_{4}$C coating shows not only $-1.19$ GPa stress but also a low rms roughness of 0.16 nm, and the measured reflectivity is 93% at the wavelength of 0.154 nm.
收稿日期: 2019-05-27
出版日期: 2019-11-25
:
07.85.Fv
(X- and γ-ray sources, mirrors, gratings, and detectors)
68.55.-a
(Thin film structure and morphology)
81.15.Cd
(Deposition by sputtering)
引用本文:
. [J]. 中国物理快报, 2019, 36(12): 120701-.
链接本文:
https://cpl.iphy.ac.cn/CN/10.1088/0256-307X/36/12/120701
或
https://cpl.iphy.ac.cn/CN/Y2019/V36/I12/120701
[1] Störmer M, Horstmann C, Siewert F et al 2010 AIP Conf. Proc. (Melbourne Australia 27 September–2 October 2009) 1234 756 [2] Jacobi S, Steeg B, Wiesmann J et al 2002 Proc. SPIE (Seattle WA USA 7–11 July 2002) 4782 113 [3] Barty A, Soufli R, McCarville T et al 2009 Opt. Express 17 15508 [4] Flechsig U, Bahrdt J, Follath R and Reiche S 2016 AIP Conf. Proc. (New York, USA 6–10 July 2015) 1741 040040 [5] Störmer M, Siewert F and Gaudin J 2011 Proc. SPIE (Prague Czech Republic 18–21 April 2011) 8078 80780G [6] Soufli R, Fernández-Perea M, Hau-Riege S P et al 2011 Proc. SPIE (Prague Czech Republic 18–21 April 2011) 8077 807702 [7] Soufli R, Pivovaroff M J, Baker S L et al 2008 Proc. SPIE (San Diego California USA 10–14 August 2008) 7077 707716 [8] Milne C J, Schietinger T, Aiba M et al 2017 Appl. Sci. 7 720 [9] Hau-Riege S P, London R A, Bionta R M et al 2009 Appl. Phys. Lett. 95 111104 [10] Pivovaroff M J, Bionta R M, Mccarville T J, Soufli R and Stefan P M 2007 Proc. SPIE (San Diego California USA 26–30 August 2007) 6705 67050O [11] Barthelmess M and Bajt S 2011 Proc. SPIE (Prague Czech Republic 18–21 April 2011) 8077 807710 [12] Morawe Ch, Supruangnet R and Ch J 2015 Thin Solid Films 588 1 [13] Jiang H, Zhu J, Huang Q et al 2011 Appl. Surf. Sci. 257 9946 [14] Soufli R, Baker S L, Robinson J C et al 2009 Proc. SPIE (Prague Czech Republic 20–23 April 2009) 7361 73610U [15] Kulikovsky V, Vorlicek V, Ctvrtlik R, Bohac P and Lapsanska H 2011 Surf. Coat. Technol. 205 4052 [16] Störmer M, Siewert F, Horstmann C, Buchheim J and Gwalt G 2018 J. Synchrotron Rad. 25 116 [17] Störmer M, Siewert F and Sinn H 2016 J. Synchrotron Rad. 23 50 [18] Windt D L 2007 Proc. SPIE (San Diego California USA 26–30 August 2007) 6688 66880R [19] Wang Y, Huang Q, Yi Q et al 2017 Opt. Express 25 7749 [20] Huang Q, Liu Y, Yang Y et al 2018 Opt. Express 26 21803 [21] Bellotti J A and Windt D L 2009 Proc. SPIE (San Diego California USA 2–6 August 2009) 7437 743715 [22] Hultman L 2000 Vacuum 57 1 [23] Soufli R, Fernández-Perea M, Baker S L et al 2012 Appl. Opt. 51 2118 [24] Li K and Deng H 2018 Nucl. Inst. Methods Phys. Res. Sect. A 895 40 [25] Lv H, Leng Y, Yan Y and Wang H 2018 Nucl. Inst. Methods Phys. Res. Sect. A 908 167 [26] Panahi N et al 2016 Chin. Phys. Lett. 33 066802 [27] Stoney G G 1909 Proc. R. Soc. London Ser. A 82 172 [28] Morawe C, Ch J and Friedrich K 2010 Proc. SPIE (San Diego California USA 1–5 August 2010) 7802 78020B [29] Church E L, Takacs P Z and Leonard T A 1989 Proc. SPIE (San Diego, USA 7–11 August 1989) 1165 136 [30] Church E L 1988 Appl. Opt. 27 1518 [31] Niibe M, Nii H and Sugie Y 2002 Jpn. J. Appl. Phys. 41 3069 [32] Thornton J A 1986 J. Vac. Sci. & Technol. A 4 3059 [33] Moulder J F, Stickle W F, Sobol P E and Bomben K D 1995 Handbook of X-Ray Photoelectron Spectroscopy (USA: Physical Electronics Inc) pp 215–230 [34] Li P, Huang Q, Jiang L et al 2016 Vacuum 128 85 [35] Soufli R, Aquila A L, Salmassi F, Fernández-Perea M and Gullikson E M 2008 Appl. Opt. 47 4633 [36] Prakash A and Sundaram K B 2017 Appl. Surf. Sci. 396 484
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