Sample | A1 | A2 | A3 | A4 | A5 | B1 | B2 | B3 | B4 | B5 | |
---|---|---|---|---|---|---|---|---|---|---|---|

FWHM (deg) | $\phi =0^{\circ}$ | 0.413 | 0.463 | 0.571 | 0.597 | 0.592 | 0.944 | 0.882 | 0.836 | 0.825 | 1.056 |

$\phi =90^{\circ}$ | 0.446 | 0.521 | 0.728 | 0.795 | 0.704 | 1.080 | 1.343 | 1.273 | 0.958 | 1.245 | |

rms roughness (nm) | 9.80 | 8.68 | 8.17 | 7.89 | 6.39 | 9.72 | 10.60 | 12.40 | 14.82 | 20.03 |

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