Chin. Phys. Lett.  2008, Vol. 25 Issue (6): 2181-2184    DOI:
Articles |
Effects of Annealing on Microstructure and Optical Properties of TiO2 Sculptured Thin Films
XIAO Xiu-Di1,2;DONG Guo-Ping1,2;QI Hong-Ji1,3;FAN Zheng-Xiu1;HE Hong-Bo1;SHAO Jian-Da1
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, PO BOX 800-211, Shanghai 2018002Graduate School of the Chinese Academy of Science, Beijing 1000493Shanghai Daheng of Optics and Fine Mechanics Co., Ltd, Shanghai 201800
Cite this article:   
XIAO Xiu-Di, DONG Guo-Ping, QI Hong-Ji et al  2008 Chin. Phys. Lett. 25 2181-2184
Download: PDF(290KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract The evolution of microstructure and optical properties of TiO2 sculptured thin films under thermal annealing is reported. XRD, field emission SEM, UV-Vis-NIR spectra are employed to characterize the microstructural and optical properties. It is found that the optimum annealing temperature for linear birefringence is 500°C. The maximum of transmission difference for linear birefringence is up to 18%, which is more than twice of that in as-deposited thin films. In addition, the sample annealed at 500°C has a minimum of column angle about 12°C. The competitive process between the microstructural and optical properties is discussed in detail. Post-annealing is a useful method to improve the linear birefringence in sculptured thin films for practical applications.
Keywords: 68.37.Hk      81.07.Be      81.40.Ef     
Received: 07 March 2008      Published: 31 May 2008
PACS:  68.37.Hk (Scanning electron microscopy (SEM) (including EBIC))  
  81.07.Be  
  81.40.Ef (Cold working, work hardening; annealing, post-deformation annealing, quenching, tempering recovery, and crystallization)  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2008/V25/I6/02181
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
XIAO Xiu-Di
DONG Guo-Ping
QI Hong-Ji
FAN Zheng-Xiu
HE Hong-Bo
SHAO Jian-Da
[1] Kundt A 1886 J. Ann. Phys. Chem. Lpz. 27 59
[2] Konig H and Helwig G 1950 Optik 6 111
[3] Robbie K and Brett M J 1997 J. Vac. Sci. Technol. A 15 1460
[4] Lakhtakia A 2002 Mater. Sci. Eng. C 19 427
[5] Robbie K, Brett M J and Lakhtakia A 1995 J. Vac. Sci.Technol. A 13 2991
[6] Robbie K, Friedrich L J, Dew S K, Smy T and Brett M J 1995 J. Vac. Sci. Technol. A 13 1032
[7] Lakhtakia A, Messier R, Brett M J and Robbie K 1996 Innov. Mater. Res. 1 165
[8] Fan J, Dyer D, Zhang G and Zhao Y 2004 Nano Lett. 42133
[9] Yu J, Zhou M, Cheng B, Yu H and Zhao X 2005 J. Mol. Catal. A:Chem. 227 75
[10] O'Regan B and Gr\"atzel M 1991 Nature 353 737
[11] Suzuki M, Ito T and Taga Y 2001 Appl. Phys. Lett. 78 3968
[12] Kiema G K, Colgan M J and Brett M J 2005 Sol. Energ.Mat. Sol. C 85 321
[13] Wang S, Fu X, Xia G, Wang J, Shao J and Fan Z 2006 Appl. Surf.Sci. 252 8734
[14] Hou Y Q, Zhang D M, Zhang G, Zhao M and Wu M 2003 Appl.Surf. Sci. 218 97
[15]Porter V R, White W B and Roy R 1972 J. Solid StateChem. 4 250
[16] Won D J, Wang C H, Jang H K and Choi D J 2001 Appl.Phys. A 73 595
[17] Cullity B D 1978 Elements or X-Ray Diffraction (Reading, MA:Addison-Wesley)
[18] Nieuwenhuizen J M and Haanstra H B 1966 Philips Tech.Rev. 27 87
[19] Tian G, Dong L, Wei C, Huang J, He H and Shao J 2006 Opt. Mater. 28 1058
[20] Daude N, Gout C and Jouanin C 1977 Phys. Rev. B 15 3229
Related articles from Frontiers Journals
[1] SI Ping-Zhan**,WANG Hai-Xia,JIANG Wei,CHEN Chun-Qiang,HU Xiu-Kun,LIU Jin-Jun,LEE Jung-Goo,CHOI Chul-Jin. Size Segregation and Super-Domain Mediated by Dipolar Interactions in 3-D Iron Nanoparticle Assemblies[J]. Chin. Phys. Lett., 2012, 29(4): 2181-2184
[2] ZHANG Hai-Bo**,LI Wei-Qin,CAO Meng. Leakage Current Simulation of Insulating Thin Film Irradiated by a Nonpenetrating Electron Beam[J]. Chin. Phys. Lett., 2012, 29(4): 2181-2184
[3] LI Zi-Yue, ZHANG Hui-Min, LIU Li-Hu, SUN Hui-Yuan. Influence of Heating Rate on Morphologies and Magnetic Properties of α-Fe2O3[J]. Chin. Phys. Lett., 2012, 29(3): 2181-2184
[4] SANG Ling, LIU Jian-Ming, XU Xiao-Qing, WANG Jun, ZHAO Gui-Juan, LIU Chang-Bo, GU Cheng-Yan, LIU Gui-Peng, WEI Hong-Yuan, LIU Xiang-Lin, YANG Shao-Yan, ZHU Qin-Sheng, WANG Zhan-Guo. Morphological Evolution of a-GaN on r-Sapphire by Metalorganic Chemical Vapor Deposition[J]. Chin. Phys. Lett., 2012, 29(2): 2181-2184
[5] YANG Shao-Peng**, KONG Wei-Guang, LIU Bo-Ya, ZHENG Wen-Yao, LI Bao-Min, LIU Xian-Hao, FU Guang-Sheng . Highly Efficient PCDTBT:PC71 BM Based Photovoltaic Devices without Thermal Annealing Treatment[J]. Chin. Phys. Lett., 2011, 28(12): 2181-2184
[6] GAO Yuan, ZHUANG Zhuo, LIU Zhan-Li, ZHAO Xue-Chuan, ZHANG Zhao-Hui. Characteristic Sizes for Exhaustion-Hardening Mechanism of Compressed Cu Single-Crystal Micropillars[J]. Chin. Phys. Lett., 2010, 27(8): 2181-2184
[7] GAO Xiao-Yong, FENG Hong-Liang, ZHANG Zeng-Yuan, MA Jiao-Min, LU Jing-Xiao. Effects of Rapid Thermal Processing on Microstructure and Optical Properties of As-Deposited Ag2O Films by Direct-Current Reactive Magnetron Sputtering[J]. Chin. Phys. Lett., 2010, 27(2): 2181-2184
[8] XIAO Xiu-Di, DONG Guo-Ping, SHAO Jian-Da, FAN Zheng-Xiu, HE Hong-Bo, QI Hong-Ji,. Tunable Anisotropic Absorption of Ag-Embedded SiO2 Thin Films by Oblique Angle Deposition[J]. Chin. Phys. Lett., 2009, 26(8): 2181-2184
[9] WANG Tao, LI Rui-Shan, PAN Xiao-Jun, ZHANG Pei-Zeng, ZHOU Ming, SONGXi, XIE Er-Qing. Improvement of Field Emission Characteristics of Copper Nitride Films with Increasing Copper Content[J]. Chin. Phys. Lett., 2009, 26(6): 2181-2184
[10] LIU Lin-Xia, SHAO Cheng-Gang, TU Liang-Cheng, LUO Jun. Measurement of Density Inhomogeneity for Source Masses in Time-of-Swing Method of Measuring[J]. Chin. Phys. Lett., 2009, 26(1): 2181-2184
[11] Sanjay Oli. String Cosmological Models in Five-Dimensional Spacetimes[J]. Chin. Phys. Lett., 2009, 26(1): 2181-2184
[12] ZHENG Li-Mei, WANG Jin-Feng, MING Bao-Quan, QI Peng, DU Juan. Phase Transition and High Piezoactivity of Sr Doped Lead-Free (Na0.53K0.422Li0.048)(Nb0.89Sb0.06Ta0.05)O3 Ceramics[J]. Chin. Phys. Lett., 2008, 25(7): 2181-2184
[13] HUA Wei, YAO Shu-De, WANG Kun, DING Zhi-Bo. Measurement and Analysis of Composition and Depth Profile of H in Amorphous Si1-xCx:H Films[J]. Chin. Phys. Lett., 2008, 25(7): 2181-2184
[14] MA Wen-Jie, WANG Yu-Ren, LAN Ding. Role of Convection Flow on the Pattern Formation in the Drying Process of Colloidal Suspension[J]. Chin. Phys. Lett., 2008, 25(4): 2181-2184
[15] YAN Jian-Feng, XING Zhi-Gang, WANG Jing, GUO Li-Wei, ZHU Xue-Liang, PENG Ming-Zeng, YU Nai-Sen, JIA Hai-Qiang, CHEN Hong, ZHOU Jun-Ming. Elimination of Crystallographic Wing Tilt of Canti-Bridged Epitaxial Laterally Overgrown GaN Films by Optimizing Growth Procedure[J]. Chin. Phys. Lett., 2007, 24(7): 2181-2184
Viewed
Full text


Abstract