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A Microwave Air Plasma Source under Atmospheric Pressure |
| LIU Liang;ZHANG Gui-Xin;FENG Jian;WANG Xin-Xin;LUO Cheng-Mu |
| Department of Electrical Engineering and Applied Electronic Technology, Tsinghua University, Beijing 100084 |
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| Cite this article: |
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LIU Liang, ZHANG Gui-Xin, FENG Jian et al 2008 Chin. Phys. Lett. 25 1019-1021 |
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Abstract We develop a new cavity with a mode similar to TE13 to produce microwave plasma, named APMPS II, which is able to produce a mass of air plasma with diameter of around 6cm, equipped with about 3kW input power under one atmosphere. The plasma seems to be homogeneous without significant filamentous discharge as observed by common camera device. We present the theory of this cavity, show the distribution of electric field of several
planes inside the cavity and give some experimental results.
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| Keywords:
52.50.Dg
52.50.Sw
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Received: 29 October 2007
Published: 27 February 2008
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| PACS: |
52.50.Dg
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(Plasma sources)
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52.50.Sw
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(Plasma heating by microwaves; ECR, LH, collisional heating)
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[1] Jin Q H, Dai S S and Huang K M 2001 Microwave Chemistry(Beijing: Science Press) chap 10 p 188 (in Chinese)
[2] Al-Shamma'a A I, Wylie S R and Lucas J 2002 IEEE Trans.Plasma Sci. 30 1863
[3] Korzec D, Werner F and Winter R 1996 Plasma Sources Sci.Technol. 5 216
[4] Werner F, Kotzec D and Engemann J 1994 Plasma Sources Sci. 3 473
[5] Roth J R 1995 Industrial Plasma Engineering:Principles (Bristol: Institute of Physics Publishing)
[6] Liu L, Zhang G X, Zhu Z J and Luo C M 2008 J. TsinghuaUniversity (Science and Technology) 48 28 (in Chinese) |
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