| Original Articles |
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Graded Index 532HR/1064HT Filter by Glancing Angle Deposition |
| SHEN Zi-Cai 1,2;LIU Shi-Jie 1,2;HUANG Jian-Bing 1;SHAO Jian-Da 1;FAN Zheng-Xiu 1 |
| 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 2018002Graduate School of the Chinese Academy of Sciences, Beijing 100049 |
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| Cite this article: |
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SHEN Zi-Cai, LIU Shi-Jie, HUANG Jian-Bing et al 2007 Chin. Phys. Lett. 24 1029-1031 |
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Abstract Glancing angle deposition is a novel method to prepare graded index
coatings. By using this method and physical vapour deposition, ZrO 2
is used to engineer graded index filter on BK7 glass substrate. Controlling the deposition rate and the periodic oscillation of oblique angle of deposited material, a 10-period graded index ZrO2 filter with high reflection near 532nm and high transmittance at wavelength 1064nm is fabricated. The causes of
difference between the theoretical and experimental results are discussed in detail. The material properties and electron gun nonlinearity are possibly the main origins of the difference, which result in the variations in both thickness control and deposition rate of the film material.
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| Keywords:
68.55.-a
78.20.-e
78.66.-w
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Received: 28 September 2006
Published: 26 March 2007
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| PACS: |
68.55.-a
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(Thin film structure and morphology)
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78.20.-e
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(Optical properties of bulk materials and thin films)
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78.66.-w
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(Optical properties of specific thin films)
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[1] Popta A C, Hawkeye M M, Sit J C and Brett M J 2004 Opt.Lett. 29 2545
[2] Robbie K, Sit J C and Brett M J 1998 J. Vac. Sci.Technol. B 16 1115
[3] Robbie K and Brett M J 1997 J. Vac. Sci. Technol. A 15 1460
[4] Lakhtakia A, Messier R, Brett M J and Robbie K 1996 Innovations Mater Res. 1 165
[5] Kennedy S R and Brett M J 2003 Appl. Opt. 42 4573
[6] Hodgkinson I J and Wu Q H 1999 Appl. Phys. Lett. 74 1794
[7] Shen Z C, Shao J D, Wang Y J and Fan Z X 2005 Acta Phys.Sin. 54 3069 (in Chinese)
[8] Fu X Y, Wang S M and Deng D G et al 2005 Chin. Phys.Lett. 22 3173
[9] Kaminska K and Robbie K 2004 Appl. Opt. 43 1570
[10] Wang S M, Xia G D, Fu X Y et al 2006 Thin Solid Films(in press)
[11] Xu B, Smith D, Reimann G and John B 2006 49th AnnualTechnical Conference Proceedings (Washington DC, 22--27 April 2006) p 319 |
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