Chin. Phys. Lett.  2007, Vol. 24 Issue (12): 3559-3562    DOI:
Original Articles |
Effect of Annealing Temperature on Electrical Properties of Ferroelectric Bi3.25La0.75Ti3O12 Capacitors
YAN Zheng1;ZHANG Wei-Tao1;WANG Yi2;ZHANG Xin1;LI Li1;ZHAO Qing-Xun1;DU Jun2;LIU Bao-Ting1
1College of Physics Science and Technology, Hebei University, Baoding 0710022Institute of Advanced Electronic Materials, General Research Institute for Non-ferrous Metals, Beijing 100088
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YAN Zheng, ZHANG Wei-Tao, WANG Yi et al  2007 Chin. Phys. Lett. 24 3559-3562
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Abstract Lanthanum-modified bismuth titanate (Bi3.25La0.75Ti3O12, BLT) thin films are
fabricated on platinized Si wafers by the sol-gel method, and the effect of annealing temperatures ranging from 650°C to 800°C on the electrical properties of Pt/BLT/Pt capacitors are investigated. It is found that polarization and leakage current of BLT capacitors strongly depend on the annealing temperature although all the capacitors demonstrate very similar characteristics, except the value of polarization, in pulse-width dependence, retention, and fatigue. Remanent polarization increases with the increase of annealing temperature, and annealing temperature of 700°C can yield the
largest remanent polarization, and then polarization decreases with increasing annealing temperature. For the 700°C annealed Pt/BLT/Pt capacitor, the remanent polarization 2Pr and the coercive field 2Ec, at an electric field of 226kV/cm, are 23.8μC/cm2 and 130kV/cm, respectively. Dielectric breakdown voltages of BLT films annealed at 750°C and 800°C are much lower than those annealed at 650°C and 700°C. At 100kV/cm, the leakage currents of BLT films prepared at 650°C and 700°C are only
1.5×10-6A/cm2 and 8.9×10-7A/cm2, espectively. Moreover, all the Pt/BLT/Pt capacitors exhibit excellent retention properties after a cumulative time of 1× m 104s and do not show any significant fatigue up to 1×1010 switching cycles
at frequency of 1MHz.
Keywords: 81.20.Fw      81.40.Ef      83.60.Np     
Received: 21 September 2007      Published: 03 December 2007
PACS:  81.20.Fw (Sol-gel processing, precipitation)  
  81.40.Ef (Cold working, work hardening; annealing, post-deformation annealing, quenching, tempering recovery, and crystallization)  
  83.60.Np (Effects of electric and magnetic fields)  
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YAN Zheng
ZHANG Wei-Tao
WANG Yi
ZHANG Xin
LI Li
ZHAO Qing-Xun
DU Jun
LIU Bao-Ting
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