Chin. Phys. Lett.  2007, Vol. 24 Issue (12): 3362-3364    DOI:
Original Articles |
Optimized Optomechanical Micro-Cantilever Array for Uncooled Infrared Imaging

DONG Feng-Liang1;ZHANG Qing-Chuan1;CHEN Da-Peng2;MIAO Zheng-Yu1;XIONG Zhi-Ming1;GUO Zhe-Ying1;LI Chao-Bo1;JIAO Bin-Bin1;WU Xiao-Ping1

1Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 2300272Microelectronics R&D Center, Chinese Academy of Sciences, Beijing 100029
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DONG Feng-Liang, ZHANG Qing-Chuan, CHEN Da-Peng et al  2007 Chin. Phys. Lett. 24 3362-3364
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Abstract We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled micro-optomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A
160×160 array with a 120μm×120μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270mK.
Keywords: 07.57.Kp      07.10.Cm      42.30.Va     
Received: 13 March 2007      Published: 03 December 2007
PACS:  07.57.Kp (Bolometers; infrared, submillimeter wave, microwave, and radiowave receivers and detectors)  
  07.10.Cm (Micromechanical devices and systems)  
  42.30.Va (Image forming and processing)  
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https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2007/V24/I12/03362
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Articles by authors
DONG Feng-Liang
ZHANG Qing-Chuan
CHEN Da-Peng
MIAO Zheng-Yu
XIONG Zhi-Ming
GUO Zhe-Ying
LI Chao-Bo
JIAO Bin-Bin
WU Xiao-Ping
[1]Rogalski A 2003 Pro. Quant. Electron. 27 59
[2] Zhao Y et al 2002 J. MEMS 11 136
[3] Perazzo T et al 1999 Appl. Phys. Lett. 74 3567
[4] Lim S et al 2005 J. MEMS. 14 683
[5] Duan Z et al 2003 Chin. Phys. Lett. 20 2130
[6] Dong F et al 2007 Sens. Actuators A 133 236
[7] Li C et al 2006 Meas. Sci. Technol. 17 1981
[8] Miao Z et al 2006 Acta Phys. Sin. 55 3208 (inChinese)
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