Chin. Phys. Lett.  2006, Vol. 23 Issue (11): 3111-3114    DOI:
Original Articles |
Fabrication and Characteristics of Thin Film Bulk Acoustic Resonators with Highly c-Axis Oriented AlN Films
GU Hao-Shuang;ZHANG Kai;HU Guang;LI Wei-Yong
State Key Laboratory of Ferroelectric and Piezoelectric Materials and Devices of Hubei Province, Faculty of Physics and Electronic Technology, Hubei University, Wuhan 430062
Cite this article:   
GU Hao-Shuang, ZHANG Kai, HU Guang et al  2006 Chin. Phys. Lett. 23 3111-3114
Download: PDF(426KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract Thin film bulk acoustic resonators are fabricated by using silicon bulk micromachining technology, which are constructed mainly from aluminium nitride (AlN) piezoelectric films. The results of x-ray diffraction, scanning electron microscopy and atomic force microscopy show that the AlN films exhibit highly c-axis orientation with good surface morphology. The resonators with the AlN films possessed a reflection coefficient -10.6dB at the resonant frequency 2.537GHz, an effective electromechanical coupling coefficient 3.75%, series quality 101.8, and parallel quality 79.7.
Keywords: 85.50.-n      84.40.-x      77.84.-s     
Published: 01 November 2006
PACS:  85.50.-n (Dielectric, ferroelectric, and piezoelectric devices)  
  84.40.-x (Radiowave and microwave (including millimeter wave) technology)  
  77.84.-s (Dielectric, piezoelectric, ferroelectric, and antiferroelectric materials)  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2006/V23/I11/03111
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
GU Hao-Shuang
ZHANG Kai
HU Guang
LI Wei-Yong
Related articles from Frontiers Journals
[1] WANG Ye-An, WANG Yun-Bo, RAO Wei, GAO Jun-Xiong, ZHOU Wen-Li, YU Jun. Electric and Magnetic Properties of the (1-x)Ba0.6Sr0.4TiO3-xCoFe2O4 Multiferroic Composite Ceramics[J]. Chin. Phys. Lett., 2012, 29(6): 3111-3114
[2] ZHANG Jun-Feng, LI De-Ren, CHEN Zheng, LU Zhi-Chao, ZHOU Shao-Xiong. Noise Suppression Effect of Composites Containing Glass-Covered Amorphous CoFeSiBCr Wires[J]. Chin. Phys. Lett., 2012, 29(6): 3111-3114
[3] GONG Yu-Fei,WU Ping,LIU Wei-Fang**,WANG Shou-Yu,LIU Guang-Yao,RAO Guang-Hui. Switchable Ferroelectric Diode Effect and Piezoelectric Properties of Bi0.9La0.1FeO3 Ceramics[J]. Chin. Phys. Lett., 2012, 29(4): 3111-3114
[4] M. R. Shah**,A. K. M. Akther Hossain. Influence of Lanthanum on the Microstructural and Dielectric Properties of Polycrystalline Ba(Ti0.5Fe0.5)O3[J]. Chin. Phys. Lett., 2012, 29(4): 3111-3114
[5] LUO Bing-Cheng, CHEN Chang-Le**, FAN Fei, JIN Ke-Xin. The Photovoltaic Properties of BiFeO3La0.7Sr0.3MnO3 Heterostructures[J]. Chin. Phys. Lett., 2012, 29(1): 3111-3114
[6] LIU Zong-Kai, ZHOU Ben-Mou**, LIU Hui-Xing, LIU Zhi-Gang, JI Yan-Liang . Direct Force Control of a Rudder with the Action of a Coplanar Waveguide Product Microwave[J]. Chin. Phys. Lett., 2011, 28(9): 3111-3114
[7] ZHANG Hong-Ling, WANG Gen-Shui, CHEN Xue-Feng, CAO Fei, DONG Xian-Lin**, GU Yan, HE Hong-Liang, LIU Yu-Sheng . Mechanism of the Pyroelectric Response under Direct-Current Bias in La-Modified Lead Zirconate Titanate Stannate Ceramics[J]. Chin. Phys. Lett., 2011, 28(9): 3111-3114
[8] DU Juan**, WANG Jin-Feng, ZANG Guo-Zhong, YI Xiu-Jie . Ca0.5Sr0.5TiO3-Modified KNN-Based Lead-Free Piezoceramics with a Wide Temperature Usage Span[J]. Chin. Phys. Lett., 2011, 28(6): 3111-3114
[9] LIU Hai-Tao, ZHONG Jia-Song, LIU Bing-Feng, LIANG Xiao-Juan, YANG Xin-Yu, JIN Huai-Dong, YANG Fan, XIANG Wei-Dong, ** . L-cystine-Assisted Growth and Mechanism of CuInS2 Nanocrystallines via Solvothermal Process[J]. Chin. Phys. Lett., 2011, 28(5): 3111-3114
[10] JIN Hai-Bo**, LI Dan, CAO Mao-Sheng, DOU Yan-Kun, CHEN Tao, WEN Bo, Simeon Agathopoulos . Microwave Absorption Properties of Ni-Foped SiC Powders in the 2–18GHz Frequency Range[J]. Chin. Phys. Lett., 2011, 28(3): 3111-3114
[11] HOU Zhi-Ling**, ZHOU Hai-Feng, YUAN Jie, KANG Yu-Qing, YANG Hui-Jing, JIN Hai-Bo, CAO Mao-Sheng** . Enhanced Ferromagnetism and Microwave Dielectric Properties of Bi0.95Y0.05FeO3 Nanocrystals[J]. Chin. Phys. Lett., 2011, 28(3): 3111-3114
[12] XU Li-Chun, WANG Ru-Zhi**, DENG Yang, YAN Hui . First Principles Study of Dopant Site Selectivity in Ordered Perovskite CaCu3Ti4O12[J]. Chin. Phys. Lett., 2011, 28(3): 3111-3114
[13] CHEN Jun, FAN Guang-Han**, PANG-Wei, ZHENG Shu-Wen . Comparison of GaN-Based Light-Emitting Diodes by Using the AlGaN Electron-Blocking Layer and InAlN Electron-Blocking Layer[J]. Chin. Phys. Lett., 2011, 28(12): 3111-3114
[14] YAO Bin, ZHENG Qin-Hong, **, PENG Jin-Hui, ZHONG Ru-Neng, XIANG Tai, XU Wan-Song . Partially Loaded Cavity Analysis by Using the 2-D FDTD Method[J]. Chin. Phys. Lett., 2011, 28(11): 3111-3114
[15] GONG Yue-Feng, SONG Zhi-Tang, LING Yun, LIU Yan, LI Yi-Jin, FENG Song-Lin. Three-Dimensional Finite Element Simulations for the Thermal Characteristics of PCRAMs with Different Buffer Layer Materials[J]. Chin. Phys. Lett., 2010, 27(8): 3111-3114
Viewed
Full text


Abstract