Influence of LiB3O5 Structure on Microstructure and Optical Properties of ZrO2 Thin Films repared by Electron Beam Evaporation

Chin. Phys. Lett.

2005, Vol. 22

Issue (1): 227-229 DOI:

Original Articles

Influence of LiB₃O₅ Structure on Microstructure and Optical Properties of ZrO₂ Thin Films repared by Electron Beam Evaporation

TAN Tian-Ya^1,2;ZHANG Da-Wei^1,2;ZHAN Mei-Qiong^1,2;SHAO Jian-Da¹;FAN Zheng-Xiu¹

¹R & D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800 ²Graduate School of the Chinese Academy of Sciences, Beijing 100039

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TAN Tian-Ya, ZHANG Da-Wei, ZHAN Mei-Qiong et al 2005 Chin. Phys. Lett. 22 227-229

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Abstract ZrO₂ thin films were deposited by using an electron beam evaporation technique on three kinds of lithium triborate (LiB₃O₅ or LBO) substrates with the surfaces at specified crystalline rientations. The influences of the LBO structure on the structural and optical properties of ZrO₂ thin films are studied by spectrophotometer and x-ray diffraction. The results indicate that the substrate structure has obvious effects on the structural and optical properties of the film: namely, the ZrO₂ thin film deposited on the X-LBO, Y-LBO and Z-LBO orients to m(-212), m(021) and o(130) directions. It is also found that the ZrO₂ thin film with m(021) has the highest refractive index and the least lattice misfit.

Keywords: 78.20.-e 68.55.Jk 81.15.Ef

Published: 01 January 2005

PACS:	78.20.-e	(Optical properties of bulk materials and thin films)
	68.55.Jk
	81.15.Ef

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y2005/V22/I1/0227

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	TAN Tian-Ya
	ZHANG Da-Wei
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	SHAO Jian-Da
	FAN Zheng-Xiu

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