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Actuation and Control of Droplets by Using Electrowetting-on-Dielectric |
| ZENG Xue-Feng;YUE Rui-Feng;WU Jian-Gang;DONG Liang;LIU Li-Tian |
| Institute of Microelectronics, Tsinghua University, Beijing 100084 |
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| Cite this article: |
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ZENG Xue-Feng, YUE Rui-Feng, WU Jian-Gang et al 2004 Chin. Phys. Lett. 21 1851-1854 |
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Abstract Electrowetting-on-dielectric (EWOD) controls directly the wettability of liquids on the solid surface by applying an electric potential to the microelectrode array under the dielectric layer. A prototype of the EWOD droplet actuator is put forward, consisting of Si used as the substrate of the microelectrode array, Si3N4 film as the dielectric layer and fluorocarbon polymer (p-C:F) film deposited by plasma enhanced chemical vapour deposition (PECVD) as the hydrophobic layer. The p-C:F film was uniform and compact, and the contact angle of deionized water on the p-C:F film reached $110 °. The actuator successfully actuated deionized droplets surrounded in silicone oil at the voltage of 35V.
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| Keywords:
85.85.+j
47.62.+q
68.08.Bc
47.55.Dz
82.35.Gh
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Published: 01 September 2004
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