Influence of External Magnetic Field on Anomalous Skin Effects in Inductively Coupled Plasmas

Chin. Phys. Lett.

2004, Vol. 21

Issue (3): 511-513 DOI:

Original Articles

Influence of External Magnetic Field on Anomalous Skin Effects in Inductively Coupled Plasmas

MAO Ming;WANG You-Nian

The State Key Laboratory of Materials Modification, Department of Physics, Dalian University of Technology, Dalian 116024

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MAO Ming, WANG You-Nian 2004 Chin. Phys. Lett. 21 511-513

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Abstract Using a one-dimensional slab model, we study the influence of the external static magnetic field on the anomalous skin effects in the inductively coupled plasma. The rf electromagnetic field in the plasma is determined by solving the linearized Boltzmann equation incorporating with the Maxwell equations. The numerical results show that, due to the existence of the external magnetic field, the anomalous skin effects are greatly enhanced and the number of regions with negative absorption is decreased.

Keywords: 52.40.Kh 52.65.-y 52.77.Dq

Published: 01 March 2004

PACS:	52.40.Kh	(Plasma sheaths)
	52.65.-y	(Plasma simulation)
	52.77.Dq	(Plasma-based ion implantation and deposition)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y2004/V21/I3/0511

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