Chin. Phys. Lett.  2003, Vol. 20 Issue (12): 2130-2132    DOI:
Original Articles |
Uncooled Optically Readable Bimaterial Micro-Cantilever Infrared Imaging Device
DUAN Zhi-Hui1;ZHANG Qing-Chuan1;WU Xiao-Ping1;PAN Liang1;CHEN Da-Peng2;WANG Wei-Bing2;GUO Zhe-Ying1
1Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027 2Microelectronics Research and Development Center, Chinese Academy of Sciences, Beijing 100029
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DUAN Zhi-Hui, ZHANG Qing-Chuan, WU Xiao-Ping et al  2003 Chin. Phys. Lett. 20 2130-2132
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Abstract We develop an uncooled infrared imaging device that contains a SiN-Au bimaterial micro-cantilever arrays detector and an optical read-out section. The detector converts the incident infrared radiation to the cantilever inclination angles, and the optical read-out section converts these angles directly to a visible image through an optical filtering operation to the spectra of the cantilever arrays with a knife-edge filter. The present results with the 140 x 98 cantilever arrays and the 8-bit A/D quantizer suggest that the objects at the temperature of 250°C at the distance as far as 1m can be detected and the noise-equivalent temperature difference (NETD) of the device is about 10 K. The further improvement of NETD is expected to approach about 14 mK with the optimized cantilever design and 12-bit quantizer.


Keywords: 07.57.Kp      07.10.Cm      42.30.Kq     
Published: 01 December 2003
PACS:  07.57.Kp (Bolometers; infrared, submillimeter wave, microwave, and radiowave receivers and detectors)  
  07.10.Cm (Micromechanical devices and systems)  
  42.30.Kq (Fourier optics)  
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https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2003/V20/I12/02130
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DUAN Zhi-Hui
ZHANG Qing-Chuan
WU Xiao-Ping
PAN Liang
CHEN Da-Peng
WANG Wei-Bing
GUO Zhe-Ying
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