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Assistant Anode in a Cathodic Arc Plasma Source |
| ZHANG Tao1,2;ZHANG Hui-Xing1;Ian. G. Brown3; Paul K. Chu2 |
| 1Beijing Radiation Center, Institute of Low Energy Nuclear Physics, Beijing Normal University, Beijing 100875
2Department of Physics and Materials Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong
3Lawrence Berkeley National Laboratory, University of California,
Berkeley, CA 94720, U.S.A. |
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| Cite this article: |
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ZHANG Tao, ZHANG Hui-Xing, Ian. G. Brown et al 2001 Chin. Phys. Lett. 18 1103-1104 |
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Abstract The performance and characteristics of a cathodic arc plasma source, consisting of a titanium cathode, an anode with and without a tungsten mesh, and a coil producing a focusing magnetic field between the anode and cathode, are investigated. The high transparency and large area of the mesh allow a high plasma flux to penetrate the anode from the cathodic arc. The mesh helps to decrease the arc resistance and the ignition voltage of the cathodic arc in the focusing magnetic field, and increase the life of the source. which means that the source makes the cathodic arc easily and greatly stabilized during the operation when a focusing magnetic field exists in the source.
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| Keywords:
52.75.Rx
52.25.Fp
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Published: 01 August 2001
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