Chin. Phys. Lett.  2000, Vol. 17 Issue (9): 686-688    DOI:
Original Articles |
Influences of H+ Implantation on the Boron-Doped Synthesized by Chemical Vapor Deposition Diamond Films
WANG Shuang-Bao;ZHU Pei-Ran;WANG Yu-Guang;FENG Ke-An
Institute of Physics, Chinese Academy of Sciences, Beijing 100080
Cite this article:   
WANG Shuang-Bao, ZHU Pei-Ran, WANG Yu-Guang et al  2000 Chin. Phys. Lett. 17 686-688
Download: PDF(315KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract Diamond films (DF) were preliminarily B doped in situ during chemical vapor deposition. Subsequently, the films were implanted with 120 keV H+ to dose of 5 x 1014 ~ 5 x 1016cm-2. After the implantation, the B doped DF become insulating and Raman measurements indicate that the implantation has amorphous carbon and graphite etched. It is known that the formation of H-B pairs plays an important pole in property changes. However, for larger dose cases, the electrical resistance of DF is influenced by radiation damage and/or non-diamond phases. In addition to them, annealing makes the specimens conducting again. This phenomenon maybe has potential for application in designing DF device.
Keywords: 68.55.-a      61.72.-y      61.80.Jh     
Published: 01 September 2000
PACS:  68.55.-a (Thin film structure and morphology)  
  61.72.-y (Defects and impurities in crystals; microstructure)  
  61.80.Jh (Ion radiation effects)  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2000/V17/I9/0686
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
WANG Shuang-Bao
ZHU Pei-Ran
WANG Yu-Guang
FENG Ke-An
Related articles from Frontiers Journals
[1] CUI Jin-Ming, CHEN Xiang-Dong, FAN Le-Le, GONG Zhao-Jun, ZOU Chong-Wen, SUN Fang-Wen, HAN Zheng-Fu, GUO Guang-Can. Generation of Nitrogen-Vacancy Centers in Diamond with Ion Implantation[J]. Chin. Phys. Lett., 2012, 29(3): 686-688
[2] DING Tao, SONG Jun-Qiang, CAI Qun. Effect of Multiple Depositions and Annealing Treatments on the Erbium Silicide Nanoislands Self-Assembled on Si(001) Substrates[J]. Chin. Phys. Lett., 2012, 29(3): 686-688
[3] CHENG Feng-Feng , FA Tao, WANG Xin-Qiang, YAO Shu-De. Dislocation and Elastic Strain in an InN Film Characterized by Synchrotron Radiation X-Ray Diffraction and Rutherford Backscattering/Channeling[J]. Chin. Phys. Lett., 2012, 29(2): 686-688
[4] XU Wei-Wei, HU Lin-Hua, LUO Xiang-Dong, LIU Pei-Sheng, DAI Song-Yuan**. The Electric Mechanism of Surface Pretreatments for Dye-Sensitized Solar Cells Based on Internal Equivalent Resistance Analysis[J]. Chin. Phys. Lett., 2012, 29(1): 686-688
[5] PAN Jiang-Hong, LIU Li-Zhe, LIU Min** . Hydrogenic-Donor Impurity States in GaAs/Al xGa 1−xAs Quantum Dots in the Presence of an Electric Field[J]. Chin. Phys. Lett., 2011, 28(8): 686-688
[6] LI Yu-Hong, **, XU Chun-Ping, GAO Chao, WANG Zhi-Guang . Ne2+ Ion Irradiation Induced Swelling Effects in Pyrochlore Ho2Ti2O7 by Using a GIXRD Technique[J]. Chin. Phys. Lett., 2011, 28(6): 686-688
[7] CHEN San, **, Lu Hong-Yan, CHEN Kun-Ji**, XU Jun, MA Zhong-Yuan, LI Wei, HUANG Xin-Fan . Two-Dimensional Cavity Resonant Modes of Si Based Bragg Reflection Ridge Waveguide[J]. Chin. Phys. Lett., 2011, 28(6): 686-688
[8] ZHOU Guang-Hong, **, ZHU Yu-Fu, LIN Yue-Bin . Thermal Decay and Reversal of Exchange Bias Field of CoFe/PtMn Bilayer after Ga+ Irradiation[J]. Chin. Phys. Lett., 2011, 28(5): 686-688
[9] LIU Chun-Xiao, , LIU Tao, LIU Xiu-Hong, WEI Wei**, PENG Bo** . Helium-Implanted Optical Planar Waveguides in Nd3+-Doped Phosphate Glass[J]. Chin. Phys. Lett., 2011, 28(11): 686-688
[10] WU Bin-Bin, PAN Feng-Ming**, YANG Yu-E . Annealing Effect of Pulsed Laser Deposited Transparent Conductive Ta-Doped Titanium Oxide Films[J]. Chin. Phys. Lett., 2011, 28(11): 686-688
[11] ZHENG Bi-Ju, LIAN Jian-She**, ZHAO Lei, JIANG Qing . Optical and Electrical Properties of ZnO/CdO Composite Thin Films Prepared by Pulse Laser Deposition[J]. Chin. Phys. Lett., 2011, 28(1): 686-688
[12] JI Guo-Jun, SHI Zhi-Ming. AFM and XPS Study of Glass Surface Coated with Titania Nanofilms by Sol-Gel Method[J]. Chin. Phys. Lett., 2010, 27(9): 686-688
[13] JI Shuai-Hua, FU Ying-Shuang, ZHANG Tong, CHEN Xi, JIA Jin-Feng, XUE Qi-Kun, MA Xu-Cun. Kondo Effect in Self-Assembled Manganese Phthalocyanine Monolayer on Pb Islands[J]. Chin. Phys. Lett., 2010, 27(8): 686-688
[14] YU Sen-Jiang, ZHANG Yong-Ju, CHEN Miao-Gen,. Edge Effects on Growth of Ordered Stress Relief Patterns in Free Sustained Aluminum Films[J]. Chin. Phys. Lett., 2010, 27(6): 686-688
[15] WANG Na, ZHANG Wen-Di, XU Ji-Peng, MA Bin, ZHANG Zong-Zhi, JIN Qing-Yuan, E. Bunte, J. Hüpkes, H. P. Bochem. Fabrication of Anodic Aluminum Oxide Templates with Small Interpore Distances[J]. Chin. Phys. Lett., 2010, 27(6): 686-688
Viewed
Full text


Abstract