Measurements of Film Thickness and Growth Temperature of YBa2Cu3O7-δ Films by Pyrometric Absorption Method

Chin. Phys. Lett.

1997, Vol. 14

Issue (5): 367-370 DOI:

Original Articles

Measurements of Film Thickness and Growth Temperature of YBa₂Cu₃O_7-δ Films by Pyrometric Absorption Method

XIONG Xu-ming;ZHOU Yue-liang;WANG Hui-sheng;CUI Da-fu;LU Hui-bin;CHEN Zheng-hao;YANG Guo-zhen

Optical Physics Laboratory, Institute of Physics, Chinese Academy of Sciences, Beijing 100080

Cite this article:

XIONG Xu-ming, ZHOU Yue-liang, WANG Hui-sheng et al 1997 Chin. Phys. Lett. 14 367-370

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Abstract A pyrometric absorption method suitable for strongly absorbing films has been developed to monitor the YBa₂Cu₃O_7-δ film growth. This method makes use of the temperature difference between the heater and the substrate. By deducing the absorption formula of radiation light and fitting it to the radiation intensity data measured, it is possible to monitor the film thickness and the film surface temperature during deposition. Experimental results show that this is a simple and practicable method.

Keywords: 68.55.Jk 68.55.-a 74.76.Bz

Published: 01 May 1997

PACS:	68.55.Jk
	68.55.-a	(Thin film structure and morphology)
	74.76.Bz

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1997/V14/I5/0367

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	XIONG Xu-ming
	ZHOU Yue-liang
	WANG Hui-sheng
	CUI Da-fu
	LU Hui-bin
	CHEN Zheng-hao
	YANG Guo-zhen

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