Chin. Phys. Lett.  1997, Vol. 14 Issue (3): 209-212    DOI:
Original Articles |
Damage Removal and Strain Relaxation in As+-Implanted Si0.57Ge0.43 Epilayers Grown by Gas Source Molecular Beam Epitaxy
ZOU Lü-fan;WANG Zhan-guo;SUN Dian-zhao;FAN Ti-wen;LIU Xue-feng;ZHANG Jing-wei
Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
Cite this article:   
ZOU Lü-fan, WANG Zhan-guo, SUN Dian-zhao et al  1997 Chin. Phys. Lett. 14 209-212
Download: PDF(380KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract The damage removal and strain relaxation in the As+-implanted Si0.57Ge0.43 epilayers were studied by double-crystal x-ray diffractornetry and transmission electron microscopy. The results presented in this paper indicate that rapid thermal annealing at temperatures higher than 950°C results in complete removal of irradiation damage accompained by the formation of GeAs precipitates which enhance the removal process of dislocations.
Keywords: 68.55.Bd      68.55.Ln      68.55.Jk     
Published: 01 March 1997
PACS:  68.55.Bd  
  68.55.Ln (Defects and impurities: doping, implantation, distribution, concentration, etc.)  
  68.55.Jk  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y1997/V14/I3/0209
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
ZOU Lü-fan
WANG Zhan-guo
SUN Dian-zhao
FAN Ti-wen
LIU Xue-feng
ZHANG Jing-wei
Related articles from Frontiers Journals
[1] PANG Li-Long, WANG Zhi-Guang, YAO Cun-Feng, ZANG Hang, LI Yuan-Fei, SUN Jian-Rong, SHEN Tie-Long, WEI Kong-Fang, ZHU Ya-Bin, SHENG Yan-Bin, CUI Ming-Huan, JIN Yun-Fan. The Structural Modification of LiTaO3 Crystal Induced by 100-keV H-ion Implantation[J]. Chin. Phys. Lett., 2012, 29(6): 209-212
[2] WANG Xiao-Fei,**,HU Qiu-Bo,LI Li-Ben,CHEN Qing-Dong,WANG Hui-Xian,. Effect of Annealing Temperature on the Structural and Electrical Properties of a−Axis-Oriented SrTiO3 Films[J]. Chin. Phys. Lett., 2012, 29(5): 209-212
[3] LI Yue,DENG Ai-Hong,**,ZHOU Yu-Lu,ZHOU Bing,WANG Kang,HOU Qing,SHI Li-Qun,QIN Xiu-Bo,WANG Bao-Yi. Helium-Related Defect Evolution in Titanium Films by Slow Positron Beam Analysis[J]. Chin. Phys. Lett., 2012, 29(4): 209-212
[4] ZHANG Li-Ran, DENG Ai-Hong, **, YANG Dong-Xu, ZHOU Yu-Lu, HOU Qing, SHI Li-Qun, ZHONG Yu-Rong, WANG Bao-Yi . Bias Effects on the Growth of Helium-Containing Titanium Films[J]. Chin. Phys. Lett., 2011, 28(7): 209-212
[5] DENG Yan-Hong, YE Chao**, YUAN Yuan, LIU Hui-Min, CUI Jin . Effect of the Viscosity of Silicone Oil on the Aggregation Behavior of C:F Clusters on a Silicone Oil Liquid Substrate[J]. Chin. Phys. Lett., 2011, 28(4): 209-212
[6] SU Yu-Cheng, ZHANG Gu-Ling**, WANG Wen-Zhong, ZOU Bin, AO Le . One-Step Preparation of N-Doped Nanowhisker TiO2 by Micro Arc Oxidation[J]. Chin. Phys. Lett., 2011, 28(2): 209-212
[7] YU Chen-Hui, LIU Cheng, HAN Xiang-Yun, KANG Wei, FANG Yan-Yan, DAI Jiang-Nan, WU Zhi-Hao, CHEN Chang-Qing** . Properties of Si Doped Al0.4Ga0.6N Epilayers with Different AlGaN Window Layer Grown on High Quality AlN Buffer by MOCVD[J]. Chin. Phys. Lett., 2011, 28(2): 209-212
[8] KANG Chao-Yang, TANG Jun, LIU Zhong-Liang, LI Li-Min, YAN Wen-Sheng, WEI Shi-Qiang, XU Peng-Shou** . Growth of Few-Layer Graphene on Sapphire Substrates by Directly Depositing Carbon Atoms[J]. Chin. Phys. Lett., 2011, 28(11): 209-212
[9] WANG Yu, GUO Kai, PEI Wei-Hua**, GUI Qiang, LI Xiao-Qian, CHEN Hong-Da, YANG Jian-Hong . Fabrication of Dry Electrode for Recording Bio-potentials[J]. Chin. Phys. Lett., 2011, 28(1): 209-212
[10] JI Guo-Jun, SHI Zhi-Ming. AFM and XPS Study of Glass Surface Coated with Titania Nanofilms by Sol-Gel Method[J]. Chin. Phys. Lett., 2010, 27(9): 209-212
[11] YU Tao, ZHANG Yi, LI Bao-Zhang, JIANG Wei-Long, WANG He, CAI Yong-An, LIU Wei, LI Feng-Yan, SUN Yun. CuInSe2 Films Prepared by a Plasma-Assisted Selenization Process in Different Working Pressures[J]. Chin. Phys. Lett., 2010, 27(2): 209-212
[12] WANG Yan-Zhi, SHAO Jian-Da, DONG Hong-Cheng, ZHANG Wei-Li, CUI Yun, HE Hong-Bo, FAN Zheng-Xiu. Design and Fabrication of Chirped Mirror[J]. Chin. Phys. Lett., 2009, 26(9): 209-212
[13] TANG Jun, LIU Zhong-Liang, KANG Chao-Yang, PAN Hai-Bin, WEI Shi-Qiang, XU Peng-Shou, GAO Yu-Qiang, XU Xian-Gang. Epitaxial Growth of Graphene on 6H-SiC (0001) by Thermal Annealing[J]. Chin. Phys. Lett., 2009, 26(8): 209-212
[14] HUANG Yan-Hong, HE Meng, TIAN Huan-Fang, ZHAO Kun, LÜ, Hui-Bin, JIN Kui-Juan, LI Jian-Qi, YANG Guo-Zhen. Laser Molecular Beam Epitaxy of Multilayer Heterostructure SrNb0.05Ti0.95O3/La0.9Sr0.1MnO3 in 10000 Unit-Cell Layers[J]. Chin. Phys. Lett., 2008, 25(9): 209-212
[15] ZHANG Li, HE Qing, JIANG Wei-long, LIU Fang-fang, LI Chang-Jian, SUN Yun. Mo Back Contact for Flexible Polyimide Substrate Cu(In, Ga)Se2 Thin-Film Solar Cells[J]. Chin. Phys. Lett., 2008, 25(9): 209-212
Viewed
Full text


Abstract