A Novel Application of the Pulsed Nitrogen Discharge in the Synthesis of Aluminum Nitride Powder by Laser Ablation

Chin. Phys. Lett.

1997, Vol. 14

Issue (12): 953-956 DOI:

Original Articles

A Novel Application of the Pulsed Nitrogen Discharge in the Synthesis of Aluminum Nitride Powder by Laser Ablation

WANG Pei-nan¹;Pan Qi;Cheung Nai-Ho;Chen Shu-Chi

¹State Key Joint Laboratory for Materials Modification by Triple Beams, Department of Physics, Fudan University, Shanghai 200433 Departnient of Physics, Hong Kong Baptist University, Hong Kong

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WANG Pei-nan, Pan Qi, Cheung Nai-Ho et al 1997 Chin. Phys. Lett. 14 953-956

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Abstract Pulsed discharge of nitrogen was applied in the laser ablation synthesis of aluminum nitride powder to provide more atomic nitrogen. Very high concentration of aluminum nitride was then achieved. The nitrogen discharge plasma was studied by optical emission spectroscopy. Temporal behaviors of the emissions from various species were observed and discussed.

Keywords: 81.20.Lb 52.80.Tn 81.15.Fg

Published: 01 December 1997

PACS:	81.20.Lb
	52.80.Tn	(Other gas discharges)
	81.15.Fg	(Pulsed laser ablation deposition)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1997/V14/I12/0953

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