Chin. Phys. Lett.  1996, Vol. 13 Issue (6): 447-450    DOI:
Original Articles |
Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma
YANG Yun;WU Han-ming
Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080
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YANG Yun, WU Han-ming 1996 Chin. Phys. Lett. 13 447-450
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Abstract Based upon the spatially inhomogeneous Boltzmann equation in two-term approximation coupled with electromagnetic and fluid model analysis for the recently developed inductively coupled plasma sources, a self-consistent electron kinetic model is developed. The electron distribution function, spatial distributions of the electron density and ionization rate are calculated and discussed.
Keywords: 52.25.Dg      52.50.Dg      52.65.-y     
Published: 01 June 1996
PACS:  52.25.Dg (Plasma kinetic equations)  
  52.50.Dg (Plasma sources)  
  52.65.-y (Plasma simulation)  
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https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y1996/V13/I6/0447
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