Chin. Phys. Lett.  1996, Vol. 13 Issue (12): 947-949    DOI:
Original Articles |
Blue Light Emission from Hydrogenated Amorphous Silicon Carbide Prepared by Xylene Source in Plasma-Enhanced Chemical Vapour Deposition System
MA Tian-fu;CHEN Kun-ji;DU Jia-fang;XU Jun;LI Wei;HUANG Xin-fan
National Laboratory of Solid State Microstructures and Department of Physics, Center for Advanced Studies in Science and Technology of Microstructures, Nanjing University, Nanjing 210093
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MA Tian-fu, CHEN Kun-ji, DU Jia-fang et al  1996 Chin. Phys. Lett. 13 947-949
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Abstract We chose xylene C8H10 as carbon source instead of conventional methane CH4 to fabricate a-Sil-xCx: H films using plasma-enhanced chemial vapour deposition method. The optical band gap of this material could be widened to 3.1eV. And the infrared absorption spectra of our films manifest the existence of aromatic ring in them. Strong blue light emission with a peak wavelength of 490nm has been observed at room temperature.

Keywords: 78.66.Jg     
Published: 01 December 1996
PACS:  78.66.Jg (Amorphous semiconductors; glasses)  
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https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y1996/V13/I12/0947
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MA Tian-fu
CHEN Kun-ji
DU Jia-fang
XU Jun
LI Wei
HUANG Xin-fan
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