Chin. Phys. Lett.  1994, Vol. 11 Issue (7): 461-464    DOI:
Original Articles |
CNx Films Deposited by Laser Ablation of Graphite Under Low Energy Nitrogen-Ion Beam Bombardment
REN Zhongmin;XIONG Xiaxing;DU Yuancheng;WU Jiada;YING Zhifeng;QIU Yuanxun;LI Fuming
State Key Joint Laboratory for Material Modification by Laser, Ion and Electron Beams, Fudan University, Shanghai 200433
Cite this article:   
REN Zhongmin, XIONG Xiaxing, DU Yuancheng et al  1994 Chin. Phys. Lett. 11 461-464
Download: PDF(240KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract Deposition of CNx thin films on Si(111) has been performed by laser ablation of graphite under a low-energy nitrogen ion beam bombardment. Films with a maximum N-concentration of 34% are obtained. The N species is found to be relatively constant along the depth of films. X-ray spectroscopy data confirm the existence of covalent C - N bonds. Nanocrystallites structure has been detected in the amorphous matrix of the films. Qualitative hardness tests indicate that the films are relatively hard and adhesive.

Keywords: 81.15.Jj      34.50.Rk      62.20.-x     
Published: 01 July 1994
PACS:  81.15.Jj (Ion and electron beam-assisted deposition; ion plating)  
  34.50.Rk (Laser-modified scattering and reactions)  
  62.20.-x (Mechanical properties of solids)  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y1994/V11/I7/0461
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
REN Zhongmin
XIONG Xiaxing
DU Yuancheng
WU Jiada
YING Zhifeng
QIU Yuanxun
LI Fuming
Related articles from Frontiers Journals
[1] YUE Yong-Hai, WANG Li-Hua, ZHANG Ze, HAN Xiao-Dong. Cross-over of the Plasticity Mechanism in Nanocrystalline Cu[J]. Chin. Phys. Lett., 2012, 29(6): 461-464
[2] SU Wei, LOU Shu-Qin, YIN Guo-Lu. Theoretical Study of the Structural and Thermodynamic Properties of Amorphous SiO2 and Amorphous SiO2 with an Oxygen Defect Center[J]. Chin. Phys. Lett., 2012, 29(6): 461-464
[3] HUANG Wei, RUAN Ya-Ping, JIA Feng-Dong, ZHONG Yin-Peng, LIU Long-Wei, DAI Xing-Can, XUE Ping, XU Xiang-Yuan, ZHONG Zhi-Ping**. Measurement of the Absolute Photoionization Cross Section for the 5P3/2 State of 87Rb in a Vapor Cell Magneto-optic Trap[J]. Chin. Phys. Lett., 2012, 29(1): 461-464
[4] JIN Min**, FANG Yong-Zheng, SHEN Hui, JIANG Guo-Jian, WANG Zhan-Yong, XU Jia-Yue . Mechanical Property Evaluation of GaAs Crystal for Solar Cells[J]. Chin. Phys. Lett., 2011, 28(8): 461-464
[5] SHAO Xi** . Prediction of a Low-Dense BC2N Phase[J]. Chin. Phys. Lett., 2011, 28(5): 461-464
[6] CHEN Yao**, JIANG Yang, XU Pei-Qiang, MA Zi-Guang, WANG Xiao-Li, WANG Lu, JIA Hai-Qiang, CHEN Hong . Stress Control in GaN Grown on 6H-SiC by Metalorganic Chemical Vapor Deposition[J]. Chin. Phys. Lett., 2011, 28(4): 461-464
[7] O. Sahin**, A. R�, za Tuncdemir, H. Ali Cetinkara, H. Salih Guder, E. Sahin . Production and Mechanical Behaviour of Biomedical CoCrMo Alloy[J]. Chin. Phys. Lett., 2011, 28(12): 461-464
[8] MA Dong-Fang, HOU Yan-Jun, CHEN Da-Nian**, WU Shan-Xing, WANG Huan-Ran . A Novel Impact Tension Testing for OFHC Copper Bars under Local Strain Controlled[J]. Chin. Phys. Lett., 2011, 28(1): 461-464
[9] SU Qian-Zhen, YU Jie, NIU Ying-Yu, CONG Shu-Lin. Rovibrational Formation of Ultracold NaH Molecules Induced by an Ultrashort Laser Pulse[J]. Chin. Phys. Lett., 2010, 27(9): 461-464
[10] B. Y. Thakore, S. G. Khambholja, P. H. Suthar, N. K. Bhatt, A. R. Jani. Collective Modes and Elastic Constants of Liquid Al83Cu17 Binary Alloy[J]. Chin. Phys. Lett., 2010, 27(9): 461-464
[11] CUI Xiu-Hua, MU Bao-Xia, DAI Kang, SHEN Yi-Fan. Excitation Transfer for K2 in High-Lying States by N2[J]. Chin. Phys. Lett., 2010, 27(7): 461-464
[12] WANG Hong, , ZHANG Zhi-Jun, ZHAO Jing-Tai, XU Jia-Yue, HU Guan-Qin, LI Pei-Jun. Mechanical Properties and Anisotropy in PbWO4 Single Crystal[J]. Chin. Phys. Lett., 2010, 27(2): 461-464
[13] ZHOU Bin**, LI Shu-Min,. erent Phase Control in e-Ar Scattering in a Bichromatic Laser Field in the Second Born Approximation[J]. Chin. Phys. Lett., 2010, 27(11): 461-464
[14] LOU Jun, LI Shu-Min,. Positron-Impact Ionization of Atomic Hydrogen in a Bichromatic Laser Field in the Second Born Approximation[J]. Chin. Phys. Lett., 2010, 27(10): 461-464
[15] XIANG Yan-Xun, XUAN Fu-Zhen, DENG Ming-Xi. Evaluation of Thermal Degradation Induced Material Damage Using Nonlinear Lamb Waves[J]. Chin. Phys. Lett., 2010, 27(1): 461-464
Viewed
Full text


Abstract