| Original Articles |
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Thermal Stability of Magnetron Sputtered Low Hydrogen
Content Diamondlike Carbon
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| CHENG Degang;LÜ Fanxiu;SUN Qinbiao;YU Wenxiu;YANG Rang |
| Department of Materials Science and Engineering, Beijing University of Science and Technology, Beijing 100083 |
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| Cite this article: |
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CHENG Degang, LÜ, Fanxiu et al 1994 Chin. Phys. Lett. 11 285-288 |
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Abstract Response to vacuum annealing at temperatures up to 600°C for 3h for low hydrogen content diamondlike carbon (LHDLC) films prepared by magnetron sputtering of pure graphite in pure Ar atmosphere has been studied. Optical properties of the as-deposited and annealed films have been characterized by ellipsometry and infrared spectroscopy. No change was found for the films annealed at up to 400°C. The LHDLC begins losing hydrogen after annealing above 400°C and the sp2 hybrid structure increases. The refractive index of the films increases with increasing annealing temperatures above 500°C. Annealing at 600°C results in graphitization and the loss of IR transparency.
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| Keywords:
68.60.Dv
78.66.-w
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Published: 01 May 1994
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| PACS: |
68.60.Dv
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(Thermal stability; thermal effects)
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78.66.-w
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(Optical properties of specific thin films)
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