Sputtering Angular Distributions of Individual Elements for Low-Energy Ar Ion Irradiation of PtCu Alloy

Chin. Phys. Lett.

1991, Vol. 8

Issue (1): 44-47 DOI:

Original Articles

Sputtering Angular Distributions of Individual Elements for Low-Energy Ar Ion Irradiation of PtCu Alloy

ZHENG Liping;LI Risheng^*;LI Mingyao;SHEN Weizu;LIN Junying;ZOU Zhiyi

Shanghai Institute of Nuclear Research, Academia Sinica, Shanghai 201800 ^*Institute of Metal Research, Academia Sinica, Shenyang 110015

Cite this article:

ZHENG Liping, LI Risheng, LI Mingyao et al 1991 Chin. Phys. Lett. 8 44-47

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Abstract The dynamic Monte Carlo program including a bombardment-induced Gibbsian segregation process was used to calculate angular distributions of individual elements from sputtered Cu_0.5Pt_0.5 alloy in the Ar ion energy range between 0.2 and 1.5keV. Calculated results show that for each investigated incident energy, the angular distribution of the Pt clement is more forward-pointed than that of the Cu one; the reason may be that different percentage of sputtered atoms (37~45% of Pt and 12~19% of Cu) come from beneath the topmost layer.

Keywords: 79.20.Nc

Published: 01 January 1991

PACS:

79.20.Nc

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1991/V8/I1/044

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	ZHENG Liping
	LI Risheng
	LI Mingyao
	SHEN Weizu
	LIN Junying
	ZOU Zhiyi

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