INVESTIGATION OF NITROGEN CONTENT INFLUENCE ON ELECTRON SPIN RESONANCE IN a-Si:H/a-SiN<suB>x</suB>:H MULATLATYERS

Chin. Phys. Lett.

1990, Vol. 7

Issue (2): 79-82 DOI:

Original Articles

INVESTIGATION OF NITROGEN CONTENT INFLUENCE ON ELECTRON SPIN RESONANCE IN a-Si:H/a-SiN_x:H MULATLATYERS

LIU Xiangna;ZHAO Zhouyin^*;WANG Yong

Physics Department, Laboratory for Solid State Microstructures, Nanjing University, Nanjing, 210008 ^*Institute of Electronic Devices, Nanjing, 210008

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LIU Xiangna, ZHAO Zhouyin, WANG Yong 1990 Chin. Phys. Lett. 7 79-82

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Abstract Influence of nitrogen content on electron spin resonance (ESR) in a-Si:H/a-SiN_x:H multilayers is studied, associated with infrared absorption analysis. The spin density decreases rapidly in the region x>~ 0.7 and approaches a saturated value, which is much less than common assumption. The results are explained in terms of the structure relaxation due to the increase of N-H bonds with increasing x and the transfer doping across interfaces.

Keywords: 72.80.Ng 61.70.Sk

Published: 01 February 1990

PACS:	72.80.Ng	(Disordered solids)
	61.70.Sk

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1990/V7/I2/079

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