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A SIMULATION STUDY OF LOW ENERGY SPUTTERING ANGULAR DISTRIBUTION
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| ZHENG Liping*,**;CUI Fuzhai**,*** |
| *Institute of Nuclear Research, Academia Sinica, Shanghai
**Ion-Beam Laboratory, Institute of Metallurgy, Academia Sinica, Shanghai
***Department of Engineering Physics, Qinghua University, Beijing
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| Cite this article: |
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ZHENG Liping, CUI Fuzhai 1988 Chin. Phys. Lett. 5 145-148 |
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Abstract The low energy sputtering angular distributions are simulated in inert gas ion-metal target combinations. It is found that the angular distribution of PKAs trends to an under-cosine shape, while the angular distribution of SKAs shows either a cosine one or an over-cosine one: the formation of the under-cosine sputtering angular distribution seems to come from the smaller mass ratio and the lower incident energy.
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Published: 01 April 1988
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