TY - Chin. Phys. Lett. A1 - Han-Han Lu, Jing-Ping Xu, Lu Liu T1 - Interfacial and Electrical Properties of GaAs Metal-Oxide-Semiconductor Capacitor with ZrAlON as the Interfacial Passivation Layer Y1 - 2017-03-21 JF - Chinese Physics Letters JO - Chin. Phys. Lett. SP - 047303EP - 047303 VL - 34 IS - 4 UR - https://cpl.iphy.ac.cn N1 - 10.1088/0256-307X/34/4/047303 ER -