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Sheath Structure of an Electronegative Plasma |
| WANG Zheng-Xiong;LIU Jin-Yuan; ZOU Xiu;LIU Yue; WANG Xiao-Gang |
| State Key Laboratory of Materials Modification by Laser, Electron and Ion Beams, Dalian University of Technology, Dalian 116024 |
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| Cite this article: |
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WANG Zheng-Xiong, LIU Jin-Yuan, ZOU Xiu et al 2003 Chin. Phys. Lett. 20 1537-1539 |
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Abstract We investigate the sheath structure of an electronegative plasma at steady state with the assumptions of cold positive ions and hot negative ions. The modified Bohm criterion is obtained with the Sagdeev potential by introducing a modified ion sound velocity. At the same time the electric potential, net space charge and particles densities in the sheath are analysed in several cases of different temperature ratios of electrons to negative ions and different density ratios of negative ions to positive ions.
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| Keywords:
52.40.Kh
52.27.Cm
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Published: 01 September 2003
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| PACS: |
52.40.Kh
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(Plasma sheaths)
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52.27.Cm
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(Multicomponent and negative-ion plasmas)
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