Investigation of Laser-Induced Damage on Multi-Layer Dielectric Gratings
KONG Wei-Jin1,2, SHEN Zi-Cai1, SHEN Jian1, SHAO Jian-Da1, FAN Zheng-Xiu1
1R&D Center for Optical Thin Film Coating, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2Graduate School of the Chinese Academy of Sciences, Beijing 100039
Investigation of Laser-Induced Damage on Multi-Layer Dielectric Gratings
KONG Wei-Jin1,2;SHEN Zi-Cai1;SHEN Jian1;SHAO Jian-Da1;FAN Zheng-Xiu1
1R&D Center for Optical Thin Film Coating, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2Graduate School of the Chinese Academy of Sciences, Beijing 100039
Abstract： We investigate mechanisms of laser induced damage thresholds (LIDTs) of multi-layer dielectric gratings (MDGs). It is found that the laser damage thresholds of MDGs and unstructured dielectric multi-layer coatings (the substrate of MDG) are 3.15J/cm2 and 9.32/cm2, respectively, at 1064nm (12ns) with the Littrow angle 51.2° and the TEM00 mode. The laser-induced damage mechanism of multi-layer dielectric is presented with the analysis of the following factors: The dominant factor is the pollution on the corrugated surface, which is induced by the complex manufacture process of multi-layer dielectric gratings; another is the electric field distribution along the corrugated surface. The third reason is due to the reduction in stoichiometry of oxide films, resulting from the manufacture process of etching.
2005, Vol. 22 
