Chin. Phys. Lett.  2019, Vol. 36 Issue (3): 038101    DOI: 10.1088/0256-307X/36/3/038101
CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
Influence of Small-Size Contaminations on Thin Film Structural Properties
F. V. Grigoriev1**, V. B. Sulimov1, Jinlong Zhang2,3,4, Xinbin Cheng2,3,4, Zhanshan Wang2,3,4, A. V. Tikhonravov1
1Research Computing Center, M.V. Lomonosov Moscow State University, Moscow 119991, Russia
2MOE Key Laboratory of Advanced Micro-Structured Materials, Shanghai 200092
3Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092
4IFSA Collaborative Innovation Center, Shanghai Jiao Tong University, Shanghai 200240
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F. V. Grigoriev, V. B. Sulimov, Jinlong Zhang et al  2019 Chin. Phys. Lett. 36 038101
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Abstract An approach for studying the influence of nano-particles on the structural properties of deposited thin films is proposed. It is based on the molecular dynamic modeling of the deposition process in the presence of contaminating nano-particles. The nano-particle is assumed to be immobile and its interaction with film atoms is described by a spherically symmetric potential. The approach is applied to the investigation of properties of silicon dioxide films. Visualization tools are used to investigate the porosity associated with nano-particles. The structure of the film near the nano-particle is studied using the radial distribution function. It is found that fluctuations of film density near the nano-particles are essentially different in the cases of low-energy and high-energy deposition processes.
Received: 23 October 2018      Published: 24 February 2019
PACS:  81.15.Aa (Theory and models of film growth)  
Fund: Supported by the RFBR under Grant No 17-57-53091, and the National Natural Science Foundation of China under Grant No 11611530687.
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https://cpl.iphy.ac.cn/10.1088/0256-307X/36/3/038101       OR      https://cpl.iphy.ac.cn/Y2019/V36/I3/038101
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F. V. Grigoriev
V. B. Sulimov
Jinlong Zhang
Xinbin Cheng
Zhanshan Wang
A. V. Tikhonravov
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