| CONDENSED MATTER: STRUCTURE, MECHANICAL AND THERMAL PROPERTIES |
|
|
|
|
Microstructure of Hydrogen-Implanted Polycrystalline $\alpha$-SiC after Annealing |
| Hui-Ping Liu, Jin-Yu Li**, Bing-Sheng Li** |
Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000
|
|
| Cite this article: |
|
Hui-Ping Liu, Jin-Yu Li, Bing-Sheng Li 2018 Chin. Phys. Lett. 35 096103 |
|
|
|
|
Abstract Microstructural evolution in H-implanted polycrystalline $\alpha$-SiC upon thermal annealing at temperature 1100${^\circ}$C is studied. After annealing, the samples are examined via cross-sectional transmission electron microscopy (XTEM) analysis. H$_{2}$ gas bubbles are formed during H implantation and some H$_{2}$ molecules are released from the bubble to form cavities during thermal annealing. The distribution and size of the observed cavities are related to the implantation fluence. The results are compared to H implanted single crystal SiC and He implanted polycrystalline $\alpha$-SiC. The possible reasons are discussed.
|
|
|
Received: 21 June 2018
Published: 29 August 2018
|
|
|
|
|
| Fund: Supported by the National Natural Science Foundation of China under Grant No 11475229. |
|
|
|
| [1] | Katoh Y, Snead L L, Henager C H, Hasegawa A, Kohyama A, Riccardi B and Hegeman A 2007 J. Nucl. Mater. 367-370 659 | | [2] | Katoh Y, Snead L L, Szlufarska I and Weber W J 2012 Curr. Opin. Solid State Mater. Sci. 16 143 | | [3] | Snead L L, Nozawa T, Katoh Y, Byun T S, Kondo S and Petti D A 2007 J. Nucl. Mater. 371 329 | | [4] | Snead L L, Nozawa T, Ferraris M, Katoh Y, Shinavski R and Sawan M 2011 J. Nucl. Mater. 417 330 | | [5] | Hasegawa A, Miwa S, Nogami S, Taniguchi A, Taguchi T and Abe K 2004 J. Nucl. Mater. 329 582 | | [6] | Li B S, Wang Z G and Jin J F 2013 Nucl. Instrum. Methods Phys. Res. Sect. B 316 239 | | [7] | Zhang L and Li B S 2017 Physica B 508 104 | | [8] | Hosono T, Hanamto K, Ueno T, Kitabatake I, Sasaki M, Nakayama Y and Nishino S 1999 Nucl. Instrum. Methods Phys. Res. Sect. B 149 67 | | [9] | Hojou K, Furuno S, Kushita K N, Sasajima N and Izui K 1998 Nucl. Instrum. Methods Phys. Res. Sect. B 141 148 | | [10] | http://www.srim.org | | [11] | Li B S, Du Y Y, Wang Z G, Wei K F, Zhang H P, Yao C F, Chang H L, Sun J R, Cui M H, Sheng Y B, Pang L L, Zhu Y B, Gao X, Luo P, Zhu H P, Wang J and Wang D 2015 Vacuum 113 75 | | [12] | Hochauer T, Misra A, Nastasi M and Mayer J W 2002 J. Appl. Phys. 92 2335 | | [13] | Sun J J, You Y W, Hou J, Li X Y, Li B S, Liu C S and Wang Z G 2017 Nucl. Fusion 57 066031 |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
