| CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
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Superconducting Nanowire Single Photon Detector with Optical Cavity |
| Jie Liu, Li-Qun Zhang, Zhen-Nan Jiang, Kamal Ahmad, Jian-She Liu, Wei Chen** |
Tsinghua National Laboratory for Information Science and Technology, Department of Microelectronics and Nanoelectronics, Institute of Microelectronics, Tsinghua University, Beijing 100084
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| Cite this article: |
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Jie Liu, Li-Qun Zhang, Zhen-Nan Jiang et al 2016 Chin. Phys. Lett. 33 088502 |
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Abstract Increasing the detection efficiency (DE) is a hot issue in the development of the superconducting nanowire single photon detector (SNSPD). In this work, a cavity-integrated structure coupled to the SNSPD is used to enhance the light absorption of nanowire. Ultra-thin Nb films are successfully prepared by magnetron sputtering, which are used to fabricate Nb/Al SNSPD with the curve of 100 nm and the square area of $4\times4$ μm$^2$ by sputtering and the lift-off method. To characterize the optical and electrical performance of the cavity-integrated SNSPD, a reliable cryogenic research system is built up based on a He$^{3}$ system. To satisfy the need of light coupling, a packaging structure with collimator is conducted. Both DE and the dark count rates increase with $I_{\rm b}$. It is also found that the DE of SNSPD with cavities can be up to 0.17% at the temperature of 0.7 K under the infrared light of 1550 nm, which is obviously higher than that of the SNSPD directly fabricated upon silicon without any cavity structure.
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Received: 22 April 2016
Published: 31 August 2016
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| PACS: |
85.25.Qc
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(Superconducting surface acoustic wave devices and other superconducting devices)
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85.25.-j
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(Superconducting devices)
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74.78.-w
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(Superconducting films and low-dimensional structures)
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