Chin. Phys. Lett.  2015, Vol. 32 Issue (12): 128102    DOI: 10.1088/0256-307X/32/12/128102
CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
The Morphology of Patterning with Pseudoplastic Metal Nanoparticle Fluids during Heat Treatment
WANG Wen1, SU Yu-Feng2, LIU Chao-Ran1,3, LI Dong-Xue1, WANG Pan1, DUAN Zhi-Yong1**
1Physical Engineering School, Zhengzhou University, Zhengzhou 450001
2Mechanical Engineering School, Zhengzhou University, Zhengzhou 450001
3Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050
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WANG Wen, SU Yu-Feng, LIU Chao-Ran et al  2015 Chin. Phys. Lett. 32 128102
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Abstract A pseudoplastic metal nanoparticle fluid (PMNF) is used in nanoimprint to fabricate semiconductors and functional devices. The evaporation of the solvent and the sintering of the Au PMNF are investigated. The key parameters, which influence the morphology of patterning, such as the radius of metal particles, the concentration of metal particles, the Hamaker constant of the solvent, viscosity of the fluids and the evaporation velocity, are analyzed. Based on a two-sphere sintering model, the equations are derived, which represent the relationships between the relative shrinkage and radius of the metal particles, sintering temperature and time. The optimal parameters for the heat treatment are provided in nanoimprint.
Received: 28 May 2015      Published: 05 January 2016
PACS:  81.16.Nd (Micro- and nanolithography)  
  81.16.Rf (Micro- and nanoscale pattern formation)  
  85.85.+j (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)  
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https://cpl.iphy.ac.cn/10.1088/0256-307X/32/12/128102       OR      https://cpl.iphy.ac.cn/Y2015/V32/I12/128102
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WANG Wen
SU Yu-Feng
LIU Chao-Ran
LI Dong-Xue
WANG Pan
DUAN Zhi-Yong
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