| CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
|
|
|
|
Structure and Absorbability of a Nanometer Nonmetallic Polymer Thin Film Coating on Quartz Used in Piezoelectric Sensors |
| GU Yu**, LI Qiang, TIAN Fang-Fang, XU Bao-Jun |
Department of Mechanics, School of Civil Engineering, Beijing Jiaotong University, Beijing 100044
|
|
| Cite this article: |
|
GU Yu, LI Qiang, TIAN Fang-Fang et al 2013 Chin. Phys. Lett. 30 108101 |
|
|
|
|
Abstract We present a new type of gas piezoelectric sensor taking quartz piezoelectric crystal as the basal material and nanometer nonmetallic polymer thin film coating as the surface. The coating, plated by vacuum electron beam dispersion (EBD) coating technology, is carried out by employing a nanometer nonmetallic polymer thin film that has properties of selecting and identifying characteristic materials. An experimental survey shows that EBD coating technology can produce a uniform thickness of the thin film coating, and the physical and chemical analyses show that the coating has a high performance of absorption using the method of infrared spectroscopy. Meanwhile, the absorption and sensitivity performance of the thin film coating will change if other organic materials are added to the coated thin film. Through the measurement of the thin film coating, the feature of sensitivity to the change of humidity is acquired. Based on the above description, a new type of gas piezoelectric sensor is designed and manufactured reasonably, which provides a valid method to rapidly monitor and distinguish complex gases.
|
|
|
Received: 22 January 2013
Published: 21 November 2013
|
|
| PACS: |
81.15.Rs
|
(Spray coating techniques)
|
| |
81.15.-z
|
(Methods of deposition of films and coatings; film growth and epitaxy)
|
|
|
|
|
|
[1] Rahimi G H, Arefi M and Khoshgoftar M J 2011 Appl. Math. Mech. 32 997
[2] Luo J, Huang Y Y, Xiong S X, Liu G Q and Zhao R 2007 Chin. Sci. Bull. 52 1311
[3] Wang L J, Wei Q S, Wu C S, Hu Z Y, Ji J and Wang P 2008 Chin. Sci. Bull. 53 1175
[4] Chen Y, Zheng R S, Lu Y H, Wang P and Ming H 2011 Chin. Opt. Lett. 9 22
[5] Wang X D, Peng X F and Zhang D M 2005 Sci. Chin. G 48 33
[6] Lu H B, Jin K J, Huang Y H, He M, Zhao K, Zhou Y L, Cheng B L, Chen Z H, Dai S Y and Yang G Z 2004 Chin. Phys. Lett. 21 1518
[7] Gu Y, Cao Y, Chi H J, Liang Q, Zhang Y J and Sun Y Y 2013 Int. J. Mol. Sci. 14 14204
[8] Sun P, Jiang Y D, Xie G Z, Du X S, Li X and Hu J 2011 Sci. Chin. Inform. Sci. 54 2680
[9] Liu L, Chi X, Wang G G, Liu C B, Shan H, Zhang X B, Wang L Y and Guan H Y 2013 Chin. Phys. Lett. 30 020701 |
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
