| CONDENSED MATTER: STRUCTURE, MECHANICAL AND THERMAL PROPERTIES |
|
|
|
|
Chemisorption-Induced Resonance Frequency Shift of a Microcantilever |
| ZHANG Ji-Qiao1**,FENG Xi-Qiao2,HUANG Gan-Yun3,YU Shou-Wen2 |
1Faculty of Civil and Transportation Engineering, Guangdong University of Technology, Guangzhou 510006
2AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084
3Department of Mechanics, School of Mechanical Engineering, Tianjin University, Tianjin 300072 |
|
| Cite this article: |
|
ZHANG Ji-Qiao, FENG Xi-Qiao, HUANG Gan-Yun et al 2012 Chin. Phys. Lett. 29 056801 |
|
|
|
|
Abstract The autonomy and property of atoms/molecules adsorbed on the surface of a microcantilever can be probed by measuring its resonance frequency shift due to adsorption. The resonance frequency change of a cantilever induced by chemisorption is theoretically studied. Oxygen chemisorbed on the Si(100) surface is taken as a representative example. We demonstrate that the resonant response of the cantilever is mainly determined by the chemisorption-induced bending stiffness variation, which depends on the bond configurations formed by the adsorbed atoms and substrate atoms. This study is helpful for optimal design of microcantilever-based sensors for various applications.
|
|
|
Received: 14 October 2011
Published: 30 April 2012
|
|
| PACS: |
68.43.-h
|
(Chemisorption/physisorption: adsorbates on surfaces)
|
| |
62.40.+i
|
(Anelasticity, internal friction, stress relaxation, and mechanical resonances)
|
|
|
|
|
|
[1] Lavrik N V, Sepaniak M J and Datskos P G 2004 Rev. Sci. Instrum. 75 2229
[2] Gupta A, Akin D and Bashira R 2004 Appl. Phys. Lett. 84 1976
[3] Ilic B, Craighead H G, Krylov S, Senaratne W, Ober C and Neuzil P 2004 J. Appl. Phys. 95 3694
[4] Chen G Y, Thundat T, Wachter E A and Warmack R J 1995 J. Appl. Phys. 77 3618
[5] Cherian S and Thundat T 2002 Appl. Phys. Lett. 80 2219
[6] Wang D F, Ono T and Esashi M 2004 Nanotechnology 15 1851
[7] Dareing D W and Thundat T 2005 J. Appl. Phys. 97 043526
[8] Huang G Y, Gao W and Yu S W 2006 Appl. Phys. Lett. 89 043506
[9] Zhang J Q, Yu S W, Feng X Q and Wang G F 2008 J. Appl. Phys. 103 093506
[10] Zhang J Q, Yu S W and Feng X Q 2008 J. Phys. D: Appl. Phys. 41 125306
[11] Yi X and Duan H L 2009 J. Mech. Phys. Solids 57 1254
[12] Green M and Liberman A 1962 J. Phys. Chem. Solids 23 1407
[13] Batra I P, Bagus P S and Hermann K 1984 Phys. Rev. Lett. 52 384
[14] Ohdomari I, Akatsu H, Yamakoshi Y and Kishimoto K 1987 J. Non-Cryst. Solids 89 239
[15] Zhang J Q, Feng X Q, Huang G Y and Yu S W 2012 Philos. Mag. Lett. (submitted)
[16] Gurtin M E and Murdoch A I 1975 Arch. Rat. Mech. Anal. 57 291
[17] Miller R E and Shenoy V B 2000 Nanotechnology 11 139
[18] Wang G F and Feng X Q 2007 Appl. Phys. Lett. 90 231904 |
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
