| FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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Design and Fabrication of a Monolithic Optoelectronic Integrated Circuit Chip Based on CMOS Compatible Technology |
| GUO Wei-Feng,ZHAO Yong,WANG Wan-Jun,SHAO Hai-Feng,YANG Jian-Yi,JIANG Xiao-Qing** |
| Department of Information Science and Electronics Engineering, Zhejiang University, Hangzhou 310027 |
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| Cite this article: |
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GUO Wei-Feng, ZHAO Yong, WANG Wan-Jun et al 2012 Chin. Phys. Lett. 29 044209 |
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Abstract A monolithic optoelectronic integrated circuit chip on a silicon-on-insulator is designed and fabricated based on complementary metal oxide semiconductor compatible technology. The chip integrates an optical Mach–Zehnder modulator (MZM) and a CMOS driving circuit with the amplification function. Test results show that the extinction ratio of the MZM is close to 20 dB and the small-signal gain of the CMOS driving circuit is about 26.9 dB. A 50 mV 10 MHz sine wave signal is amplified by the driving circuit, and then drives the MZM successfully.
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Received: 09 January 2012
Published: 04 April 2012
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| PACS: |
42.82.-m
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(Integrated optics)
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42.82.Et
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(Waveguides, couplers, and arrays)
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85.60.Bt
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(Optoelectronic device characterization, design, and modeling)
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