| CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
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Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate |
| ZHOU Yan1, WANG Hai-Long1**, MA Chuan-He1,2, GONG Qian2, FENG Song-Lin2
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1 Shandong Provincial Key Laboratory of Laser Polarization and Information Technology, Department of Physics, Qufu Normal University, Qufu 273165
2 State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 200050
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| Cite this article: |
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ZHOU Yan, WANG Hai-Long, MA Chuan-He et al 2011 Chin. Phys. Lett. 28 078102 |
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Abstract Hinged mirror arrays are widely utilized for display applications and optical communication. They can be fabricated by an self-assembly technique using the strain in lattice-mismatched epitaxial layers. A multilayer structure including a strain-compensated layer, a digital alloy sacrificial layer and a strain bilayer, is grown by molecular-beam epitaxy. Self-assembly hinged mirrors on a GaAs substrate have been successfully fabricated by photolithography and selective etching. The hinge fabrication method with a strain bilayer is simple and flexible. Structures formed by multiple hinged plates will enable the self-assembly of more complex three-dimensional microstructures.
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| Keywords:
81.16.Rf
81.16.Dn
81.05.Ea
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Received: 21 September 2010
Published: 29 June 2011
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