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Micro Humidity Sensor with High Sensitivity and Quick Response/Recovery Based on ZnO/TiO2 Composite Nanofibers |
| XU Lei, WANG Rui**, XIAO Qi, ZHANG Dan, LIU Yong
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Key Laboratory of Composite Materials, Tianjin Polytechnic University, Tianjin 300160
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| Cite this article: |
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XU Lei, WANG Rui, XIAO Qi et al 2011 Chin. Phys. Lett. 28 070702 |
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Abstract ZnO/TiO2 composite nanofibers are synthesized by an electrospinning method and characterized by x-ray diffraction, scanning electron microscopy, and transmission electron microscopy. A micro humidity sensor is fabricated by spinning the precursors of these nanofibers on a ceramic substrate with Ag-Pd interdigitated electrodes. Humidity sensing investigation reveals that this micro sensor offers high sensitivity and quick response/recovery at an operating frequency of 100 Hz. The corresponding impedance changes more than four orders of magnitude within the whole humidity range from 10% to 90% relative humidity (RH), and the response and recovery times are about 4 and 12 s, respectively. The maximum hysteresis is around 2% RH. The humidity sensing mechanism is also discussed based on the nanofiber structure and morphology.
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07.07.Df
82.47.Rs
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Received: 01 November 2010
Published: 29 June 2011
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| PACS: |
07.07.Df
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(Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)
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82.47.Rs
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(Electrochemical sensors)
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