ATOMIC AND MOLECULAR PHYSICS |
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Second Harmonic Generation in Scanning Probe Microscopy for Edge Localization |
HU Xiao-Gen**, LI Yu-He**, LIN Hao-Shan, WANG Dong-Sheng, QI Xin
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State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084
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Cite this article: |
HU Xiao-Gen, LI Yu-He, LIN Hao-Shan et al 2011 Chin. Phys. Lett. 28 043402 |
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Abstract We present an approach of second harmonic generation for edge localization of nano-scale defects measurement, based on the impact of the oscillating tip on the sample that induces higher harmonics of the excitation frequency. The harmonic signals of tip motion are measured by the heterodyne interferometry. The edge amplitude ratio for the edge characterization can be calculated by a mechanics model and the threshold of edge localization is experimentally determined by second harmonic profiles. This approach has been successfully utilized to measure the pitch of a standard sample. The results show that the second harmonic is sensitive to locating the edge of nano-scale defects with high accuracy.
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Keywords:
34.10.+x
07.60.Ly
42.25.Hz
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Received: 15 September 2010
Published: 29 March 2011
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PACS: |
34.10.+x
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(General theories and models of atomic and molecular collisions and interactions (including statistical theories, transition state, stochastic and trajectory models, etc.))
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07.60.Ly
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(Interferometers)
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42.25.Hz
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(Interference)
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