Chin. Phys. Lett.  2011, Vol. 28 Issue (3): 038101    DOI: 10.1088/0256-307X/28/3/038101
CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
Fabrication of a Polymer Micro Needle Array by Mask-Dragging X-Ray Lithography and Alignment X-Ray Lithography
LI Yi-Gui1**, YANG Chun-Sheng1, LIU Jing-Quan1, SUGIYAMA Susumu2
1Institute of Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240
2Global Innovation Research Center, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
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LI Yi-Gui, YANG Chun-Sheng, LIU Jing-Quan et al  2011 Chin. Phys. Lett. 28 038101
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Abstract Polymer materials such as transparent thermoplastic poly(methyl methacrylate) (PMMA) have been of great interest in the research and development of integrated circuits and micro-electromechanical systems due to their relatively low cost and easy process. We fabricated PMMA-based polymer hollow microneedle arrays by mask-dragging and aligning x-ray lithography. Techniques for 3D micromachining by direct lithography using x-rays are developed. These techniques are based on using image projection in which the x-ray is used to illuminate an appropriate gold pattern on a polyimide film mask. The mask is imaged onto the PMMA sample. A pattern with an area of up to 100 ×100 mm2 can be fabricated with sub-micron resolution and a highly accurate order of a few microns by using a dragging mask. The fabrication technology has several advantages, such as forming complex 3D micro structures, high throughput and low cost.
Keywords: 81.16.Nd      81.16.Rf      81.07.Oj     
Received: 13 October 2010      Published: 28 February 2011
PACS:  81.16.Nd (Micro- and nanolithography)  
  81.16.Rf (Micro- and nanoscale pattern formation)  
  81.07.Oj (Nanoelectromechanical systems (NEMS))  
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https://cpl.iphy.ac.cn/10.1088/0256-307X/28/3/038101       OR      https://cpl.iphy.ac.cn/Y2011/V28/I3/038101
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LI Yi-Gui
YANG Chun-Sheng
LIU Jing-Quan
SUGIYAMA Susumu
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[2] Tang W C, Nguyen T C and Howe R T 1990 Sensors and Actuators A 21 328
[3] Kim S H, Lee S H and Kim Y K 2002 J. Micromech. Microeng. 12 128
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[6] Johnson W A and Warne L K 1995 J. Microelectromech. Syst. 4 49
[7] Zhao Y and Cui T 2003 J. Micromech. Microeng. 13 430
[8] Li Y G and Sugiyama S 2005 Memoirs of the SR Center Ritsumeikan University 7 19
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