| CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
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Transparent Conductive Al-Doped ZnO/Cu Bilayer Films Grown on Polymer Substrates at Room Temperature |
| HUANG Ji-Jie1, WANG Yu-Ping1, LU Jian-Guo1**, GONG Li2, YE Zhi-Zhen1
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1State Key Laboratory of Silicon Materials, Department of Materials Science and Engineering, Zhejiang University, Hangzhou 310027
2College of Materials Science and Engineering, Changsha University of Science and Technology, Changsha 410015
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| Cite this article: |
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HUANG Ji-Jie, WANG Yu-Ping, LU Jian-Guo et al 2011 Chin. Phys. Lett. 28 127306 |
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Abstract Al-doped ZnO (AZO)/Cu bi-layer films are deposited by dc magnetron sputtering on polycarbonate substrates at room temperature. The structural, electrical and optical properties of the films are investigated at various sputtering powers of the Cu layer. The AZO/Cu bi-layer film deposited at a moderate sputtering power of 180 W for the Cu layer displayed the highest figure of merit of 3.47×10−3 Ω-1, with a low sheet resistance of 12.38 Ω/sq, an acceptable visible transmittance of 73%, and a high near-infrared reflectance of about 50%.
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| Keywords:
73.21.Ac
73.21.Ga
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Received: 26 September 2011
Published: 29 November 2011
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