Chin. Phys. Lett.  2011, Vol. 28 Issue (11): 110701    DOI: 10.1088/0256-307X/28/11/110701
GENERAL |
Highly Sensitive Rayleigh Wave Hydrogen Sensors with WO3 Sensing Layers at Room Temperature
WANG Cheng, FAN Li, ZHANG Shu-Yi**, YANG Yue-Tao, ZHOU Ding-Mao, SHUI Xiu-Ji
Lab of Modern Acoustics, Institute of Acoustics, Nanjing University, Nanjing 210093
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WANG Cheng, FAN Li, ZHANG Shu-Yi et al  2011 Chin. Phys. Lett. 28 110701
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Abstract Rayleigh wave hydrogen sensors based on 128° YX−LiNbO3 substrates with WO3 sensing layers operating at room temperature are studied. The experimental results indicate that the WO3 layers obtained by a sol−gel method have much higher sensitivities because the sensing layers produced by the sol-gel method have small grains and high roughness and porosity. It is also confirmed that in the sol-gel method, keeping WO3 solutions at low temperature and/or decreasing the viscosity of the solutions can decrease the grain sizes and increase the hydrogen-absorbability of the sensing layer. Under the optimized preparation conditions, the high sensitivity of the hydrogen sensors at room temperature is obtained, in which 1% hydrogen in natural air induces the frequency shift of 72 kHz at the operating frequency of 124.2 MHz.
Keywords: 07.07.Df      81.20.Fw      43.35.Yb      43.38.Rh     
Received: 14 July 2011      Published: 30 October 2011
PACS:  07.07.Df (Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)  
  81.20.Fw (Sol-gel processing, precipitation)  
  43.35.Yb (Ultrasonic instrumentation and measurement techniques)  
  43.38.Rh (Surface acoustic wave transducers)  
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https://cpl.iphy.ac.cn/10.1088/0256-307X/28/11/110701       OR      https://cpl.iphy.ac.cn/Y2011/V28/I11/110701
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WANG Cheng
FAN Li
ZHANG Shu-Yi
YANG Yue-Tao
ZHOU Ding-Mao
SHUI Xiu-Ji
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