| CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
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Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure |
| ZHANG Yun-Xiao, PAN Jiao-Qing, ZHAO Ling-Juan, ZHU Hong-Liang, WANG Wei |
| Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, PO Box 912, Beijing 100083 |
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| Cite this article: |
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ZHANG Yun-Xiao, PAN Jiao-Qing, ZHAO Ling-Juan et al 2010 Chin. Phys. Lett. 27 028501 |
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Abstract A new evanescently coupled uni-traveling carrier photodiode (EC-UTC-PD) is designed, fabricated and characterized, which incorporates a multimode diluted waveguide structure and UTC active waveguide structure together. A high responsivity of 0.68 A/W at 1.55-μm without an anti-reflection coating, a linear photocurrent responsivity of more than 21 mA, and a large -1 dB vertical alignment tolerance of 2.5 μm are achieved.
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| Keywords:
85.30.2z
85.60.Dw
85.60.Bt
85.60.Gz
85.60.-q
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Received: 20 September 2009
Published: 08 February 2010
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| PACS: |
85.30.2z
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85.60.Dw
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(Photodiodes; phototransistors; photoresistors)
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85.60.Bt
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(Optoelectronic device characterization, design, and modeling)
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85.60.Gz
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(Photodetectors (including infrared and CCD detectors))
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85.60.-q
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(Optoelectronic devices)
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