| FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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Fabrication of 3D Templates Using a Large Depth of Focus Femtosecond Laser |
| LI Xiao-Fan1,3, WINFIELD Richard2, O'BRIEN Shane2, CHEN Liang-Yao1 |
| 1Department of Optical Science and Engineering, Fudan University, Shanghai 2004332Tyndall National Institute, Lee Maltings, Prospect Row, Cork, Ireland3Department of Microelectronic Engineering, University College Cork, Cork, Ireland |
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| Cite this article: |
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LI Xiao-Fan, WINFIELD Richard, O'BRIEN Shane et al 2009 Chin. Phys. Lett. 26 094203 |
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Abstract We report the use of a large depth of focus Bessel beam in the fabrication of cell structures. Two axicon lenses are investigated in the formation of high aspect ratio line structures. A sol-gel resin, with good mechanical strength, is polymerised in a modified two-photon polymerisation system. Examples of different two-dimensional grids are presented to show that the lateral resolution can be maintained even in the rapid fabrication of high-sided structures.
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| Keywords:
42.60.-v
82.35.+t
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Received: 05 March 2009
Published: 28 August 2009
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