| CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
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Surface Micromachined Adjustable Micro-Concave Mirror for Bio-Detection Applications |
| KUO Ju-Nan1,2, CHEN Wei-Lun3, JYWE Wen-Yuh1 |
| 1Department of Automation Engineering, National Formosa University, Yunlin 6322Common Lab for Micro/Nano Science and Technology, National Formosa University, Yunlin 6323Institute of Electro-Optical and Materials Science, National Formosa University, Yunlin 632 |
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| Cite this article: |
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KUO Ju-Nan, CHEN Wei-Lun, JYWE Wen-Yuh 2009 Chin. Phys. Lett. 26 088501 |
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Abstract We present a bio-detection system integrated with an adjustable micro-concave mirror. The bio-detection system consists of an adjustable micro-concave mirror, micro flow cytometer chip and optical detection module. The adjustable micro-concave mirror can be fabricated with ease using commercially available MEMS foundry services (such as multiuser MEMS processes, MUMPs) and its curvature can be controlled utilizing thermal or electrical effects. Experimental results show that focal lengths of the micro-concave mirror ranging from 313.5 to 2275.0μm are achieved. The adjustable micro-concave mirror can be used to increase the efficiency of optical detection and provide a high signal-to-noise ratio. The developed micro-concave mirror is integrated with a micro flow cytometer for cell counting applications. Successful counting of fluorescent-labeled beads is demonstrated using the developed method.
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| Keywords:
85.85.+j
81.40.Tv
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Received: 09 January 2009
Published: 30 July 2009
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| PACS: |
85.85.+j
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(Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)
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81.40.Tv
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(Optical and dielectric properties related to treatment conditions)
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[1] Burns D M and Bright V M 1998 Proc. IEEE MEMS Conf. (Heidelberg, Germany 25--29 January 1998) p 460
[2] Shao Y, Dickensheets D L and Himmer P 2004 IEEE J.Sel. Top. Quantum Electron. 10 528
[3] Burns D M and Bright V M 1997 Proc. SPIE 3008100
[4] Hou M T-K, Liao K M, Yeh H Z, Hong P Y and Chen R S 2002 IEEE/LEOS International Conference on Optical MEMS (Lugano, Switzerland 20--23 August 2002) p 20
[5] Lin M J and Chen R S 2004 Sens. Actuator 115109
[6] Saif M T A and MacDonald N C 1996 J. MEMS 5 79
[7] Dunn M L, Zhang Y and Bright V M 2002 J. MEMS 11 372
[8] Carter J, Cowen A, Hardy B, Mahadevan R, Stonefield M andWilcenski S 2005 MEMSCAP Inc., Durham, NC, U.S.A.
[9] Yang S Y, Hsiung S K, Hung Y C, Chang C M, Liao T L andLee G B 2006 Meas. Sci. Technol. 17 2001
[10] Huh D, Gu W, Kamotami Y, Grotberg J B and Takayama S 2005 Physiol. Meas. 26 73 |
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