| PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES |
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One-Dimensional Fluid Model for Dust Particles in Dual-Frequency Capacitively Coupled Silane Discharges |
| LIU Xiang-Mei, SONG Yuan-Hong, WANG You-Nian |
| School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 |
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| Cite this article: |
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LIU Xiang-Mei, SONG Yuan-Hong, WANG You-Nian 2009 Chin. Phys. Lett. 26 085201 |
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Abstract A self-consistent fluid model, which incorporates density and flux balances of electrons, ions, neutrals and nanoparticles, electron energy balance, and Poisson's equation, is employed to investigate the capacitively coupled silane discharge modulated by dual-frequency electric sources. In this discharge process, nanoparticles are formed by a successive chemical reactions of anion with silane. The density distributions of the precursors in the dust particle formation are put forward, and the charging, transport and growth of nanoparticles are simulated. In this work, we focus our main attention on the influences of the high-frequency and low-frequency voltage on nanoparticle densities, nanoparticle charge distributions in both the bulk plasma and sheath region.
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| Keywords:
52.27.Lw
52.65.-y
52.80.Pi
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Received: 02 March 2009
Published: 30 July 2009
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| PACS: |
52.27.Lw
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(Dusty or complex plasmas; plasma crystals)
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52.65.-y
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(Plasma simulation)
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52.80.Pi
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(High-frequency and RF discharges)
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